5/18/2010	8:44:03 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/18/2010	8:44:04 AM	Recipe started at 8:44 AM
5/18/2010	8:44:04 AM	H2 valve closed
5/18/2010	8:44:04 AM	BCl3 valve closed
5/18/2010	8:44:04 AM	PH3 valve closed
5/18/2010	8:44:04 AM	SiCl4 pre valve closed
5/18/2010	8:44:04 AM	SiCl4 post valve closed
5/18/2010	8:44:04 AM	Main Vac valve closed
5/18/2010	8:44:04 AM	Bypass valve closed
5/18/2010	8:44:04 AM	Bubbler valve closed
5/18/2010	8:44:04 AM	Helium valve opened
5/18/2010	8:44:04 AM	Helium MFC set to  500.000000
5/18/2010	8:44:04 AM	H2 MFC set to  0.000000
5/18/2010	8:44:04 AM	BCl3 MFC set to  0.000000
5/18/2010	8:44:04 AM	SiCl4 MFC set to  0.000000
5/18/2010	8:44:04 AM	Bypass solenoid MFC set to  0.000000
5/18/2010	8:44:04 AM	Tube furnace set to 0
5/18/2010	8:45:26 AM	Helium valve closed
5/18/2010	8:45:26 AM	H2 valve closed
5/18/2010	8:45:26 AM	BCl3 valve closed
5/18/2010	8:45:26 AM	PH3 valve closed
5/18/2010	8:45:26 AM	SiCl4 pre valve closed
5/18/2010	8:45:26 AM	SiCl4 post valve closed
5/18/2010	8:45:26 AM	Main Vac valve closed
5/18/2010	8:45:26 AM	Bypass valve closed
5/18/2010	8:45:26 AM	Bubbler valve closed
5/18/2010	8:45:26 AM	Helium MFC set to  0.000000
5/18/2010	8:45:26 AM	H2 MFC set to  0.000000
5/18/2010	8:45:26 AM	BCl3 MFC set to  0.000000
5/18/2010	8:45:26 AM	SiCl4 MFC set to  0.000000
5/18/2010	8:45:26 AM	Bypass solenoid MFC set to  0.000000
5/18/2010	8:45:26 AM	Tube furnace set to 0
5/18/2010	8:45:26 AM	Run finished at 8:45 AM
5/18/2010	8:45:26 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/18/2010	8:57:45 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/18/2010	8:57:46 AM	Recipe started at 8:57 AM
5/18/2010	8:57:46 AM	Helium valve closed
5/18/2010	8:57:46 AM	H2 valve closed
5/18/2010	8:57:46 AM	BCl3 valve closed
5/18/2010	8:57:46 AM	PH3 valve closed
5/18/2010	8:57:46 AM	SiCl4 pre valve closed
5/18/2010	8:57:46 AM	SiCl4 post valve closed
5/18/2010	8:57:46 AM	Main Vac valve closed
5/18/2010	8:57:46 AM	Bubbler valve closed
5/18/2010	8:57:46 AM	Bypass valve opened
5/18/2010	8:57:46 AM	Helium MFC set to  0.000000
5/18/2010	8:57:46 AM	H2 MFC set to  0.000000
5/18/2010	8:57:46 AM	BCl3 MFC set to  0.000000
5/18/2010	8:57:46 AM	SiCl4 MFC set to  0.000000
5/18/2010	8:57:46 AM	Bypass solenoid MFC set to  0.000000
5/18/2010	8:57:46 AM	Tube furnace set to 0
5/18/2010	8:58:33 AM	Helium valve closed
5/18/2010	8:58:33 AM	H2 valve closed
5/18/2010	8:58:33 AM	BCl3 valve closed
5/18/2010	8:58:33 AM	PH3 valve closed
5/18/2010	8:58:33 AM	SiCl4 pre valve closed
5/18/2010	8:58:33 AM	SiCl4 post valve closed
5/18/2010	8:58:33 AM	Bubbler valve closed
5/18/2010	8:58:33 AM	Main Vac valve opened
5/18/2010	8:58:33 AM	Bypass valve opened
5/18/2010	8:58:33 AM	Helium MFC set to  0.000000
5/18/2010	8:58:33 AM	H2 MFC set to  0.000000
5/18/2010	8:58:33 AM	BCl3 MFC set to  0.000000
5/18/2010	8:58:33 AM	SiCl4 MFC set to  0.000000
5/18/2010	8:58:33 AM	Bypass solenoid MFC set to  0.000000
5/18/2010	8:58:33 AM	Tube furnace set to 0
5/18/2010	8:58:34 AM	Run finished at 8:58 AM
5/18/2010	8:58:34 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/18/2010	8:59:24 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/18/2010	8:59:25 AM	Recipe started at 8:59 AM
5/18/2010	8:59:25 AM	H2 valve closed
5/18/2010	8:59:25 AM	BCl3 valve closed
5/18/2010	8:59:25 AM	PH3 valve closed
5/18/2010	8:59:25 AM	SiCl4 pre valve closed
5/18/2010	8:59:25 AM	SiCl4 post valve closed
5/18/2010	8:59:25 AM	Main Vac valve closed
5/18/2010	8:59:25 AM	Bypass valve closed
5/18/2010	8:59:25 AM	Bubbler valve closed
5/18/2010	8:59:25 AM	Helium valve opened
5/18/2010	8:59:25 AM	Helium MFC set to  500.000000
5/18/2010	8:59:25 AM	H2 MFC set to  0.000000
5/18/2010	8:59:25 AM	BCl3 MFC set to  0.000000
5/18/2010	8:59:25 AM	SiCl4 MFC set to  0.000000
5/18/2010	8:59:25 AM	Bypass solenoid MFC set to  0.000000
5/18/2010	8:59:25 AM	Tube furnace set to 0
5/18/2010	9:00:46 AM	Helium valve closed
5/18/2010	9:00:46 AM	H2 valve closed
5/18/2010	9:00:46 AM	BCl3 valve closed
5/18/2010	9:00:46 AM	PH3 valve closed
5/18/2010	9:00:46 AM	SiCl4 pre valve closed
5/18/2010	9:00:46 AM	SiCl4 post valve closed
5/18/2010	9:00:46 AM	Main Vac valve closed
5/18/2010	9:00:46 AM	Bypass valve closed
5/18/2010	9:00:46 AM	Bubbler valve closed
5/18/2010	9:00:46 AM	Helium MFC set to  0.000000
5/18/2010	9:00:46 AM	H2 MFC set to  0.000000
5/18/2010	9:00:46 AM	BCl3 MFC set to  0.000000
5/18/2010	9:00:46 AM	SiCl4 MFC set to  0.000000
5/18/2010	9:00:46 AM	Bypass solenoid MFC set to  0.000000
5/18/2010	9:00:46 AM	Tube furnace set to 0
5/18/2010	9:00:46 AM	Run finished at 9:00 AM
5/18/2010	9:00:46 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/18/2010	9:00:49 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/18/2010	9:00:50 AM	Recipe started at 9:00 AM
5/18/2010	9:00:50 AM	Helium valve closed
5/18/2010	9:00:50 AM	H2 valve closed
5/18/2010	9:00:50 AM	BCl3 valve closed
5/18/2010	9:00:50 AM	PH3 valve closed
5/18/2010	9:00:50 AM	SiCl4 pre valve closed
5/18/2010	9:00:50 AM	SiCl4 post valve closed
5/18/2010	9:00:50 AM	Main Vac valve closed
5/18/2010	9:00:50 AM	Bubbler valve closed
5/18/2010	9:00:50 AM	Bypass valve opened
5/18/2010	9:00:50 AM	Helium MFC set to  0.000000
5/18/2010	9:00:50 AM	H2 MFC set to  0.000000
5/18/2010	9:00:50 AM	BCl3 MFC set to  0.000000
5/18/2010	9:00:50 AM	SiCl4 MFC set to  0.000000
5/18/2010	9:00:50 AM	Bypass solenoid MFC set to  0.000000
5/18/2010	9:00:50 AM	Tube furnace set to 0
5/18/2010	9:01:23 AM	Helium valve closed
5/18/2010	9:01:23 AM	H2 valve closed
5/18/2010	9:01:23 AM	BCl3 valve closed
5/18/2010	9:01:23 AM	PH3 valve closed
5/18/2010	9:01:23 AM	SiCl4 pre valve closed
5/18/2010	9:01:23 AM	SiCl4 post valve closed
5/18/2010	9:01:23 AM	Bubbler valve closed
5/18/2010	9:01:23 AM	Main Vac valve opened
5/18/2010	9:01:23 AM	Bypass valve opened
5/18/2010	9:01:23 AM	Helium MFC set to  0.000000
5/18/2010	9:01:23 AM	H2 MFC set to  0.000000
5/18/2010	9:01:23 AM	BCl3 MFC set to  0.000000
5/18/2010	9:01:23 AM	SiCl4 MFC set to  0.000000
5/18/2010	9:01:23 AM	Bypass solenoid MFC set to  0.000000
5/18/2010	9:01:23 AM	Tube furnace set to 0
5/18/2010	9:01:23 AM	Run finished at 9:01 AM
5/18/2010	9:01:23 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/18/2010	9:01:44 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/18/2010	9:01:45 AM	Recipe started at 9:01 AM
5/18/2010	9:01:45 AM	H2 valve closed
5/18/2010	9:01:45 AM	BCl3 valve closed
5/18/2010	9:01:45 AM	PH3 valve closed
5/18/2010	9:01:45 AM	SiCl4 pre valve closed
5/18/2010	9:01:45 AM	SiCl4 post valve closed
5/18/2010	9:01:45 AM	Main Vac valve closed
5/18/2010	9:01:45 AM	Bypass valve closed
5/18/2010	9:01:45 AM	Bubbler valve closed
5/18/2010	9:01:45 AM	Helium valve opened
5/18/2010	9:01:45 AM	Helium MFC set to  500.000000
5/18/2010	9:01:45 AM	H2 MFC set to  0.000000
5/18/2010	9:01:45 AM	BCl3 MFC set to  0.000000
5/18/2010	9:01:45 AM	SiCl4 MFC set to  0.000000
5/18/2010	9:01:45 AM	Bypass solenoid MFC set to  0.000000
5/18/2010	9:01:45 AM	Tube furnace set to 0
5/18/2010	9:03:06 AM	Helium valve closed
5/18/2010	9:03:06 AM	H2 valve closed
5/18/2010	9:03:06 AM	BCl3 valve closed
5/18/2010	9:03:06 AM	PH3 valve closed
5/18/2010	9:03:06 AM	SiCl4 pre valve closed
5/18/2010	9:03:06 AM	SiCl4 post valve closed
5/18/2010	9:03:06 AM	Main Vac valve closed
5/18/2010	9:03:06 AM	Bypass valve closed
5/18/2010	9:03:06 AM	Bubbler valve closed
5/18/2010	9:03:06 AM	Helium MFC set to  0.000000
5/18/2010	9:03:06 AM	H2 MFC set to  0.000000
5/18/2010	9:03:06 AM	BCl3 MFC set to  0.000000
5/18/2010	9:03:06 AM	SiCl4 MFC set to  0.000000
5/18/2010	9:03:06 AM	Bypass solenoid MFC set to  0.000000
5/18/2010	9:03:06 AM	Tube furnace set to 0
5/18/2010	9:03:06 AM	Run finished at 9:03 AM
5/18/2010	9:03:06 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/18/2010	9:03:13 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/18/2010	9:03:14 AM	Recipe started at 9:03 AM
5/18/2010	9:03:14 AM	Helium valve closed
5/18/2010	9:03:14 AM	H2 valve closed
5/18/2010	9:03:14 AM	BCl3 valve closed
5/18/2010	9:03:14 AM	PH3 valve closed
5/18/2010	9:03:14 AM	SiCl4 pre valve closed
5/18/2010	9:03:14 AM	SiCl4 post valve closed
5/18/2010	9:03:14 AM	Main Vac valve closed
5/18/2010	9:03:14 AM	Bubbler valve closed
5/18/2010	9:03:14 AM	Bypass valve opened
5/18/2010	9:03:14 AM	Helium MFC set to  0.000000
5/18/2010	9:03:14 AM	H2 MFC set to  0.000000
5/18/2010	9:03:14 AM	BCl3 MFC set to  0.000000
5/18/2010	9:03:14 AM	SiCl4 MFC set to  0.000000
5/18/2010	9:03:14 AM	Bypass solenoid MFC set to  0.000000
5/18/2010	9:03:14 AM	Tube furnace set to 0
5/18/2010	9:03:47 AM	Helium valve closed
5/18/2010	9:03:47 AM	H2 valve closed
5/18/2010	9:03:47 AM	BCl3 valve closed
5/18/2010	9:03:47 AM	PH3 valve closed
5/18/2010	9:03:47 AM	SiCl4 pre valve closed
5/18/2010	9:03:47 AM	SiCl4 post valve closed
5/18/2010	9:03:47 AM	Bubbler valve closed
5/18/2010	9:03:47 AM	Main Vac valve opened
5/18/2010	9:03:47 AM	Bypass valve opened
5/18/2010	9:03:47 AM	Helium MFC set to  0.000000
5/18/2010	9:03:47 AM	H2 MFC set to  0.000000
5/18/2010	9:03:47 AM	BCl3 MFC set to  0.000000
5/18/2010	9:03:47 AM	SiCl4 MFC set to  0.000000
5/18/2010	9:03:47 AM	Bypass solenoid MFC set to  0.000000
5/18/2010	9:03:47 AM	Tube furnace set to 0
5/18/2010	9:03:47 AM	Run finished at 9:03 AM
5/18/2010	9:03:47 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/18/2010	9:05:19 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/18/2010	9:05:20 AM	Recipe started at 9:05 AM
5/18/2010	9:05:20 AM	H2 valve closed
5/18/2010	9:05:20 AM	BCl3 valve closed
5/18/2010	9:05:20 AM	PH3 valve closed
5/18/2010	9:05:20 AM	SiCl4 pre valve closed
5/18/2010	9:05:20 AM	SiCl4 post valve closed
5/18/2010	9:05:20 AM	Main Vac valve closed
5/18/2010	9:05:20 AM	Bypass valve closed
5/18/2010	9:05:20 AM	Bubbler valve closed
5/18/2010	9:05:20 AM	Helium valve opened
5/18/2010	9:05:20 AM	Helium MFC set to  500.000000
5/18/2010	9:05:20 AM	H2 MFC set to  0.000000
5/18/2010	9:05:20 AM	BCl3 MFC set to  0.000000
5/18/2010	9:05:20 AM	SiCl4 MFC set to  0.000000
5/18/2010	9:05:20 AM	Bypass solenoid MFC set to  0.000000
5/18/2010	9:05:20 AM	Tube furnace set to 0
5/18/2010	9:06:41 AM	Helium valve closed
5/18/2010	9:06:41 AM	H2 valve closed
5/18/2010	9:06:41 AM	BCl3 valve closed
5/18/2010	9:06:41 AM	PH3 valve closed
5/18/2010	9:06:41 AM	SiCl4 pre valve closed
5/18/2010	9:06:41 AM	SiCl4 post valve closed
5/18/2010	9:06:41 AM	Main Vac valve closed
5/18/2010	9:06:41 AM	Bypass valve closed
5/18/2010	9:06:41 AM	Bubbler valve closed
5/18/2010	9:06:41 AM	Helium MFC set to  0.000000
5/18/2010	9:06:41 AM	H2 MFC set to  0.000000
5/18/2010	9:06:41 AM	BCl3 MFC set to  0.000000
5/18/2010	9:06:41 AM	SiCl4 MFC set to  0.000000
5/18/2010	9:06:41 AM	Bypass solenoid MFC set to  0.000000
5/18/2010	9:06:41 AM	Tube furnace set to 0
5/18/2010	9:06:42 AM	Run finished at 9:06 AM
5/18/2010	9:06:42 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/18/2010	9:06:45 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/18/2010	9:06:46 AM	Recipe started at 9:06 AM
5/18/2010	9:06:46 AM	Helium valve closed
5/18/2010	9:06:46 AM	H2 valve closed
5/18/2010	9:06:46 AM	BCl3 valve closed
5/18/2010	9:06:46 AM	PH3 valve closed
5/18/2010	9:06:46 AM	SiCl4 pre valve closed
5/18/2010	9:06:46 AM	SiCl4 post valve closed
5/18/2010	9:06:46 AM	Main Vac valve closed
5/18/2010	9:06:46 AM	Bubbler valve closed
5/18/2010	9:06:46 AM	Bypass valve opened
5/18/2010	9:06:46 AM	Helium MFC set to  0.000000
5/18/2010	9:06:46 AM	H2 MFC set to  0.000000
5/18/2010	9:06:46 AM	BCl3 MFC set to  0.000000
5/18/2010	9:06:46 AM	SiCl4 MFC set to  0.000000
5/18/2010	9:06:46 AM	Bypass solenoid MFC set to  0.000000
5/18/2010	9:06:46 AM	Tube furnace set to 0
5/18/2010	9:07:18 AM	Helium valve closed
5/18/2010	9:07:18 AM	H2 valve closed
5/18/2010	9:07:18 AM	BCl3 valve closed
5/18/2010	9:07:18 AM	PH3 valve closed
5/18/2010	9:07:18 AM	SiCl4 pre valve closed
5/18/2010	9:07:18 AM	SiCl4 post valve closed
5/18/2010	9:07:18 AM	Bubbler valve closed
5/18/2010	9:07:18 AM	Main Vac valve opened
5/18/2010	9:07:18 AM	Bypass valve opened
5/18/2010	9:07:18 AM	Helium MFC set to  0.000000
5/18/2010	9:07:18 AM	H2 MFC set to  0.000000
5/18/2010	9:07:18 AM	BCl3 MFC set to  0.000000
5/18/2010	9:07:18 AM	SiCl4 MFC set to  0.000000
5/18/2010	9:07:18 AM	Bypass solenoid MFC set to  0.000000
5/18/2010	9:07:18 AM	Tube furnace set to 0
5/18/2010	9:07:19 AM	Run finished at 9:07 AM
5/18/2010	9:07:19 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/18/2010	9:08:10 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
5/18/2010	9:08:16 AM	Recipe started at 9:08 AM
5/18/2010	9:08:16 AM	H2 valve closed
5/18/2010	9:08:16 AM	BCl3 valve closed
5/18/2010	9:08:16 AM	PH3 valve closed
5/18/2010	9:08:16 AM	SiCl4 pre valve closed
5/18/2010	9:08:16 AM	SiCl4 post valve closed
5/18/2010	9:08:16 AM	Main Vac valve closed
5/18/2010	9:08:16 AM	Bypass valve closed
5/18/2010	9:08:16 AM	Bubbler valve closed
5/18/2010	9:08:16 AM	Helium valve opened
5/18/2010	9:08:16 AM	Helium MFC set to  500.000000
5/18/2010	9:08:16 AM	H2 MFC set to  0.000000
5/18/2010	9:08:16 AM	BCl3 MFC set to  0.000000
5/18/2010	9:08:16 AM	SiCl4 MFC set to  0.000000
5/18/2010	9:08:16 AM	Bypass solenoid MFC set to  0.000000
5/18/2010	9:08:16 AM	Tube furnace set to 0
5/18/2010	9:09:39 AM	Helium valve closed
5/18/2010	9:09:39 AM	H2 valve closed
5/18/2010	9:09:39 AM	BCl3 valve closed
5/18/2010	9:09:39 AM	PH3 valve closed
5/18/2010	9:09:39 AM	SiCl4 pre valve closed
5/18/2010	9:09:39 AM	SiCl4 post valve closed
5/18/2010	9:09:39 AM	Main Vac valve closed
5/18/2010	9:09:39 AM	Bypass valve closed
5/18/2010	9:09:39 AM	Bubbler valve closed
5/18/2010	9:09:39 AM	Helium MFC set to  0.000000
5/18/2010	9:09:39 AM	H2 MFC set to  0.000000
5/18/2010	9:09:39 AM	BCl3 MFC set to  0.000000
5/18/2010	9:09:39 AM	SiCl4 MFC set to  0.000000
5/18/2010	9:09:39 AM	Bypass solenoid MFC set to  0.000000
5/18/2010	9:09:40 AM	Tube furnace set to 0
5/18/2010	9:09:55 AM	Helium valve closed
5/18/2010	9:09:55 AM	H2 valve closed
5/18/2010	9:09:55 AM	BCl3 valve closed
5/18/2010	9:09:55 AM	PH3 valve closed
5/18/2010	9:09:55 AM	SiCl4 pre valve closed
5/18/2010	9:09:55 AM	SiCl4 post valve closed
5/18/2010	9:09:55 AM	Main Vac valve closed
5/18/2010	9:09:55 AM	Bubbler valve closed
5/18/2010	9:09:55 AM	Bypass valve opened
5/18/2010	9:09:55 AM	Helium MFC set to  0.000000
5/18/2010	9:09:55 AM	H2 MFC set to  0.000000
5/18/2010	9:09:55 AM	BCl3 MFC set to  0.000000
5/18/2010	9:09:55 AM	SiCl4 MFC set to  0.000000
5/18/2010	9:09:55 AM	Bypass solenoid MFC set to  0.000000
5/18/2010	9:09:55 AM	Tube furnace set to 0
5/18/2010	9:10:27 AM	Helium valve closed
5/18/2010	9:10:27 AM	H2 valve closed
5/18/2010	9:10:27 AM	BCl3 valve closed
5/18/2010	9:10:27 AM	PH3 valve closed
5/18/2010	9:10:27 AM	SiCl4 pre valve closed
5/18/2010	9:10:27 AM	SiCl4 post valve closed
5/18/2010	9:10:27 AM	Bubbler valve closed
5/18/2010	9:10:27 AM	Main Vac valve opened
5/18/2010	9:10:27 AM	Bypass valve opened
5/18/2010	9:10:27 AM	Helium MFC set to  0.000000
5/18/2010	9:10:27 AM	H2 MFC set to  0.000000
5/18/2010	9:10:27 AM	BCl3 MFC set to  0.000000
5/18/2010	9:10:27 AM	SiCl4 MFC set to  0.000000
5/18/2010	9:10:27 AM	Bypass solenoid MFC set to  0.000000
5/18/2010	9:10:28 AM	Tube furnace set to 0
5/18/2010	9:15:28 AM	H2 valve closed
5/18/2010	9:15:28 AM	BCl3 valve closed
5/18/2010	9:15:28 AM	PH3 valve closed
5/18/2010	9:15:28 AM	SiCl4 pre valve closed
5/18/2010	9:15:28 AM	SiCl4 post valve closed
5/18/2010	9:15:28 AM	Main Vac valve closed
5/18/2010	9:15:28 AM	Bypass valve closed
5/18/2010	9:15:28 AM	Bubbler valve closed
5/18/2010	9:15:28 AM	Helium valve opened
5/18/2010	9:15:28 AM	Helium MFC set to  500.000000
5/18/2010	9:15:28 AM	H2 MFC set to  0.000000
5/18/2010	9:15:28 AM	BCl3 MFC set to  0.000000
5/18/2010	9:15:28 AM	SiCl4 MFC set to  0.000000
5/18/2010	9:15:28 AM	Bypass solenoid MFC set to  0.000000
5/18/2010	9:15:28 AM	Tube furnace set to 0
5/18/2010	9:16:51 AM	Helium valve closed
5/18/2010	9:16:51 AM	H2 valve closed
5/18/2010	9:16:51 AM	BCl3 valve closed
5/18/2010	9:16:51 AM	PH3 valve closed
5/18/2010	9:16:51 AM	SiCl4 pre valve closed
5/18/2010	9:16:51 AM	SiCl4 post valve closed
5/18/2010	9:16:51 AM	Main Vac valve closed
5/18/2010	9:16:51 AM	Bypass valve closed
5/18/2010	9:16:51 AM	Bubbler valve closed
5/18/2010	9:16:51 AM	Helium MFC set to  0.000000
5/18/2010	9:16:51 AM	H2 MFC set to  0.000000
5/18/2010	9:16:51 AM	BCl3 MFC set to  0.000000
5/18/2010	9:16:51 AM	SiCl4 MFC set to  0.000000
5/18/2010	9:16:51 AM	Bypass solenoid MFC set to  0.000000
5/18/2010	9:16:51 AM	Tube furnace set to 0
5/18/2010	9:17:06 AM	Helium valve closed
5/18/2010	9:17:06 AM	H2 valve closed
5/18/2010	9:17:06 AM	BCl3 valve closed
5/18/2010	9:17:06 AM	PH3 valve closed
5/18/2010	9:17:06 AM	SiCl4 pre valve closed
5/18/2010	9:17:06 AM	SiCl4 post valve closed
5/18/2010	9:17:06 AM	Main Vac valve closed
5/18/2010	9:17:06 AM	Bubbler valve closed
5/18/2010	9:17:06 AM	Bypass valve opened
5/18/2010	9:17:06 AM	Helium MFC set to  0.000000
5/18/2010	9:17:06 AM	H2 MFC set to  0.000000
5/18/2010	9:17:06 AM	BCl3 MFC set to  0.000000
5/18/2010	9:17:06 AM	SiCl4 MFC set to  0.000000
5/18/2010	9:17:06 AM	Bypass solenoid MFC set to  0.000000
5/18/2010	9:17:06 AM	Tube furnace set to 0
5/18/2010	9:17:39 AM	Helium valve closed
5/18/2010	9:17:39 AM	H2 valve closed
5/18/2010	9:17:39 AM	BCl3 valve closed
5/18/2010	9:17:39 AM	PH3 valve closed
5/18/2010	9:17:39 AM	SiCl4 pre valve closed
5/18/2010	9:17:39 AM	SiCl4 post valve closed
5/18/2010	9:17:39 AM	Bubbler valve closed
5/18/2010	9:17:39 AM	Main Vac valve opened
5/18/2010	9:17:39 AM	Bypass valve opened
5/18/2010	9:17:39 AM	Helium MFC set to  0.000000
5/18/2010	9:17:39 AM	H2 MFC set to  0.000000
5/18/2010	9:17:39 AM	BCl3 MFC set to  0.000000
5/18/2010	9:17:39 AM	SiCl4 MFC set to  0.000000
5/18/2010	9:17:39 AM	Bypass solenoid MFC set to  0.000000
5/18/2010	9:17:39 AM	Tube furnace set to 0
5/18/2010	9:22:39 AM	H2 valve closed
5/18/2010	9:22:39 AM	BCl3 valve closed
5/18/2010	9:22:39 AM	PH3 valve closed
5/18/2010	9:22:39 AM	SiCl4 pre valve closed
5/18/2010	9:22:39 AM	SiCl4 post valve closed
5/18/2010	9:22:39 AM	Main Vac valve closed
5/18/2010	9:22:39 AM	Bypass valve closed
5/18/2010	9:22:39 AM	Bubbler valve closed
5/18/2010	9:22:39 AM	Helium valve opened
5/18/2010	9:22:39 AM	Helium MFC set to  500.000000
5/18/2010	9:22:39 AM	H2 MFC set to  0.000000
5/18/2010	9:22:39 AM	BCl3 MFC set to  0.000000
5/18/2010	9:22:39 AM	SiCl4 MFC set to  0.000000
5/18/2010	9:22:39 AM	Bypass solenoid MFC set to  0.000000
5/18/2010	9:22:39 AM	Tube furnace set to 0
5/18/2010	9:24:02 AM	Helium valve closed
5/18/2010	9:24:02 AM	H2 valve closed
5/18/2010	9:24:02 AM	BCl3 valve closed
5/18/2010	9:24:02 AM	PH3 valve closed
5/18/2010	9:24:02 AM	SiCl4 pre valve closed
5/18/2010	9:24:02 AM	SiCl4 post valve closed
5/18/2010	9:24:02 AM	Main Vac valve closed
5/18/2010	9:24:02 AM	Bypass valve closed
5/18/2010	9:24:02 AM	Bubbler valve closed
5/18/2010	9:24:02 AM	Helium MFC set to  0.000000
5/18/2010	9:24:02 AM	H2 MFC set to  0.000000
5/18/2010	9:24:02 AM	BCl3 MFC set to  0.000000
5/18/2010	9:24:02 AM	SiCl4 MFC set to  0.000000
5/18/2010	9:24:02 AM	Bypass solenoid MFC set to  0.000000
5/18/2010	9:24:02 AM	Tube furnace set to 0
5/18/2010	9:24:17 AM	Helium valve closed
5/18/2010	9:24:17 AM	H2 valve closed
5/18/2010	9:24:17 AM	BCl3 valve closed
5/18/2010	9:24:17 AM	PH3 valve closed
5/18/2010	9:24:17 AM	SiCl4 pre valve closed
5/18/2010	9:24:17 AM	SiCl4 post valve closed
5/18/2010	9:24:17 AM	Main Vac valve closed
5/18/2010	9:24:17 AM	Bubbler valve closed
5/18/2010	9:24:18 AM	Bypass valve opened
5/18/2010	9:24:18 AM	Helium MFC set to  0.000000
5/18/2010	9:24:18 AM	H2 MFC set to  0.000000
5/18/2010	9:24:18 AM	BCl3 MFC set to  0.000000
5/18/2010	9:24:18 AM	SiCl4 MFC set to  0.000000
5/18/2010	9:24:18 AM	Bypass solenoid MFC set to  0.000000
5/18/2010	9:24:18 AM	Tube furnace set to 0
5/18/2010	9:24:50 AM	Helium valve closed
5/18/2010	9:24:50 AM	H2 valve closed
5/18/2010	9:24:50 AM	BCl3 valve closed
5/18/2010	9:24:50 AM	PH3 valve closed
5/18/2010	9:24:50 AM	SiCl4 pre valve closed
5/18/2010	9:24:50 AM	SiCl4 post valve closed
5/18/2010	9:24:50 AM	Bubbler valve closed
5/18/2010	9:24:50 AM	Main Vac valve opened
5/18/2010	9:24:50 AM	Bypass valve opened
5/18/2010	9:24:50 AM	Helium MFC set to  0.000000
5/18/2010	9:24:50 AM	H2 MFC set to  0.000000
5/18/2010	9:24:50 AM	BCl3 MFC set to  0.000000
5/18/2010	9:24:50 AM	SiCl4 MFC set to  0.000000
5/18/2010	9:24:50 AM	Bypass solenoid MFC set to  0.000000
5/18/2010	9:24:50 AM	Tube furnace set to 0
5/18/2010	9:25:03 AM	Helium valve closed
5/18/2010	9:25:03 AM	H2 valve closed
5/18/2010	9:25:03 AM	BCl3 valve closed
5/18/2010	9:25:03 AM	PH3 valve closed
5/18/2010	9:25:03 AM	SiCl4 pre valve closed
5/18/2010	9:25:03 AM	SiCl4 post valve closed
5/18/2010	9:25:03 AM	Bubbler valve closed
5/18/2010	9:25:03 AM	Main Vac valve opened
5/18/2010	9:25:03 AM	Bypass valve opened
5/18/2010	9:25:03 AM	Helium MFC set to  0.000000
5/18/2010	9:25:03 AM	H2 MFC set to  0.000000
5/18/2010	9:25:03 AM	BCl3 MFC set to  0.000000
5/18/2010	9:25:03 AM	SiCl4 MFC set to  0.000000
5/18/2010	9:25:03 AM	Bypass solenoid MFC set to  0.000000
5/18/2010	9:25:03 AM	Tube furnace set to 0
5/18/2010	9:25:04 AM	Run finished at 9:25 AM
5/18/2010	9:25:04 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
5/18/2010	9:26:54 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/18/2010	9:26:55 AM	Recipe started at 9:26 AM
5/18/2010	9:26:55 AM	H2 valve closed
5/18/2010	9:26:55 AM	BCl3 valve closed
5/18/2010	9:26:55 AM	PH3 valve closed
5/18/2010	9:26:55 AM	SiCl4 pre valve closed
5/18/2010	9:26:55 AM	SiCl4 post valve closed
5/18/2010	9:26:55 AM	Main Vac valve closed
5/18/2010	9:26:55 AM	Bypass valve closed
5/18/2010	9:26:55 AM	Bubbler valve closed
5/18/2010	9:26:55 AM	Helium valve opened
5/18/2010	9:26:55 AM	Helium MFC set to  500.000000
5/18/2010	9:26:55 AM	H2 MFC set to  0.000000
5/18/2010	9:26:55 AM	BCl3 MFC set to  0.000000
5/18/2010	9:26:55 AM	SiCl4 MFC set to  0.000000
5/18/2010	9:26:55 AM	Bypass solenoid MFC set to  0.000000
5/18/2010	9:26:55 AM	Tube furnace set to 0
5/18/2010	9:28:16 AM	Helium valve closed
5/18/2010	9:28:16 AM	H2 valve closed
5/18/2010	9:28:16 AM	BCl3 valve closed
5/18/2010	9:28:16 AM	PH3 valve closed
5/18/2010	9:28:16 AM	SiCl4 pre valve closed
5/18/2010	9:28:16 AM	SiCl4 post valve closed
5/18/2010	9:28:16 AM	Main Vac valve closed
5/18/2010	9:28:16 AM	Bypass valve closed
5/18/2010	9:28:16 AM	Bubbler valve closed
5/18/2010	9:28:16 AM	Helium MFC set to  0.000000
5/18/2010	9:28:16 AM	H2 MFC set to  0.000000
5/18/2010	9:28:16 AM	BCl3 MFC set to  0.000000
5/18/2010	9:28:16 AM	SiCl4 MFC set to  0.000000
5/18/2010	9:28:16 AM	Bypass solenoid MFC set to  0.000000
5/18/2010	9:28:16 AM	Tube furnace set to 0
5/18/2010	9:28:16 AM	Run finished at 9:28 AM
5/18/2010	9:28:16 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/18/2010	9:28:22 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/18/2010	9:28:23 AM	Recipe started at 9:28 AM
5/18/2010	9:28:23 AM	Helium valve closed
5/18/2010	9:28:23 AM	H2 valve closed
5/18/2010	9:28:23 AM	BCl3 valve closed
5/18/2010	9:28:23 AM	PH3 valve closed
5/18/2010	9:28:23 AM	SiCl4 pre valve closed
5/18/2010	9:28:23 AM	SiCl4 post valve closed
5/18/2010	9:28:23 AM	Main Vac valve closed
5/18/2010	9:28:23 AM	Bubbler valve closed
5/18/2010	9:28:23 AM	Bypass valve opened
5/18/2010	9:28:23 AM	Helium MFC set to  0.000000
5/18/2010	9:28:23 AM	H2 MFC set to  0.000000
5/18/2010	9:28:23 AM	BCl3 MFC set to  0.000000
5/18/2010	9:28:23 AM	SiCl4 MFC set to  0.000000
5/18/2010	9:28:23 AM	Bypass solenoid MFC set to  0.000000
5/18/2010	9:28:23 AM	Tube furnace set to 0
5/18/2010	9:28:56 AM	Helium valve closed
5/18/2010	9:28:56 AM	H2 valve closed
5/18/2010	9:28:56 AM	BCl3 valve closed
5/18/2010	9:28:56 AM	PH3 valve closed
5/18/2010	9:28:56 AM	SiCl4 pre valve closed
5/18/2010	9:28:56 AM	SiCl4 post valve closed
5/18/2010	9:28:56 AM	Bubbler valve closed
5/18/2010	9:28:56 AM	Main Vac valve opened
5/18/2010	9:28:56 AM	Bypass valve opened
5/18/2010	9:28:56 AM	Helium MFC set to  0.000000
5/18/2010	9:28:56 AM	H2 MFC set to  0.000000
5/18/2010	9:28:56 AM	BCl3 MFC set to  0.000000
5/18/2010	9:28:56 AM	SiCl4 MFC set to  0.000000
5/18/2010	9:28:56 AM	Bypass solenoid MFC set to  0.000000
5/18/2010	9:28:56 AM	Tube furnace set to 0
5/18/2010	9:28:56 AM	Run finished at 9:28 AM
5/18/2010	9:28:56 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/18/2010	9:30:47 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/18/2010	9:30:48 AM	Recipe started at 9:30 AM
5/18/2010	9:30:48 AM	Helium valve closed
5/18/2010	9:30:48 AM	H2 valve closed
5/18/2010	9:30:48 AM	BCl3 valve closed
5/18/2010	9:30:48 AM	PH3 valve closed
5/18/2010	9:30:48 AM	SiCl4 pre valve closed
5/18/2010	9:30:48 AM	SiCl4 post valve closed
5/18/2010	9:30:48 AM	Main Vac valve closed
5/18/2010	9:30:48 AM	Bubbler valve closed
5/18/2010	9:30:48 AM	Bypass valve opened
5/18/2010	9:30:48 AM	Helium MFC set to  0.000000
5/18/2010	9:30:48 AM	H2 MFC set to  0.000000
5/18/2010	9:30:48 AM	BCl3 MFC set to  0.000000
5/18/2010	9:30:48 AM	SiCl4 MFC set to  0.000000
5/18/2010	9:30:48 AM	Bypass solenoid MFC set to  0.000000
5/18/2010	9:30:48 AM	Tube furnace set to 0
5/18/2010	9:30:48 AM	Helium valve closed
5/18/2010	9:30:48 AM	H2 valve closed
5/18/2010	9:30:48 AM	BCl3 valve closed
5/18/2010	9:30:48 AM	PH3 valve closed
5/18/2010	9:30:48 AM	SiCl4 pre valve closed
5/18/2010	9:30:48 AM	SiCl4 post valve closed
5/18/2010	9:30:48 AM	Bubbler valve closed
5/18/2010	9:30:48 AM	Main Vac valve opened
5/18/2010	9:30:48 AM	Bypass valve opened
5/18/2010	9:30:48 AM	Helium MFC set to  0.000000
5/18/2010	9:30:48 AM	H2 MFC set to  0.000000
5/18/2010	9:30:48 AM	BCl3 MFC set to  0.000000
5/18/2010	9:30:48 AM	SiCl4 MFC set to  0.000000
5/18/2010	9:30:48 AM	Bypass solenoid MFC set to  0.000000
5/18/2010	9:30:48 AM	Tube furnace set to 0
5/18/2010	9:30:49 AM	Run finished at 9:30 AM
5/18/2010	9:30:49 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/18/2010	9:30:50 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/18/2010	9:30:50 AM	Recipe started at 9:30 AM
5/18/2010	9:30:50 AM	H2 valve closed
5/18/2010	9:30:50 AM	BCl3 valve closed
5/18/2010	9:30:50 AM	PH3 valve closed
5/18/2010	9:30:50 AM	SiCl4 pre valve closed
5/18/2010	9:30:50 AM	SiCl4 post valve closed
5/18/2010	9:30:50 AM	Main Vac valve closed
5/18/2010	9:30:50 AM	Bypass valve closed
5/18/2010	9:30:50 AM	Bubbler valve closed
5/18/2010	9:30:50 AM	Helium valve opened
5/18/2010	9:30:50 AM	Helium MFC set to  500.000000
5/18/2010	9:30:50 AM	H2 MFC set to  0.000000
5/18/2010	9:30:50 AM	BCl3 MFC set to  0.000000
5/18/2010	9:30:50 AM	SiCl4 MFC set to  0.000000
5/18/2010	9:30:50 AM	Bypass solenoid MFC set to  0.000000
5/18/2010	9:30:50 AM	Tube furnace set to 0
5/18/2010	9:32:11 AM	Helium valve closed
5/18/2010	9:32:11 AM	H2 valve closed
5/18/2010	9:32:11 AM	BCl3 valve closed
5/18/2010	9:32:11 AM	PH3 valve closed
5/18/2010	9:32:11 AM	SiCl4 pre valve closed
5/18/2010	9:32:11 AM	SiCl4 post valve closed
5/18/2010	9:32:11 AM	Main Vac valve closed
5/18/2010	9:32:11 AM	Bypass valve closed
5/18/2010	9:32:11 AM	Bubbler valve closed
5/18/2010	9:32:11 AM	Helium MFC set to  0.000000
5/18/2010	9:32:11 AM	H2 MFC set to  0.000000
5/18/2010	9:32:11 AM	BCl3 MFC set to  0.000000
5/18/2010	9:32:11 AM	SiCl4 MFC set to  0.000000
5/18/2010	9:32:11 AM	Bypass solenoid MFC set to  0.000000
5/18/2010	9:32:11 AM	Tube furnace set to 0
5/18/2010	9:32:12 AM	Run finished at 9:32 AM
5/18/2010	9:32:12 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/18/2010	9:32:14 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/18/2010	9:32:14 AM	Recipe started at 9:32 AM
5/18/2010	9:32:14 AM	Helium valve closed
5/18/2010	9:32:14 AM	H2 valve closed
5/18/2010	9:32:14 AM	BCl3 valve closed
5/18/2010	9:32:14 AM	PH3 valve closed
5/18/2010	9:32:14 AM	SiCl4 pre valve closed
5/18/2010	9:32:14 AM	SiCl4 post valve closed
5/18/2010	9:32:14 AM	Main Vac valve closed
5/18/2010	9:32:14 AM	Bubbler valve closed
5/18/2010	9:32:14 AM	Bypass valve opened
5/18/2010	9:32:14 AM	Helium MFC set to  0.000000
5/18/2010	9:32:14 AM	H2 MFC set to  0.000000
5/18/2010	9:32:14 AM	BCl3 MFC set to  0.000000
5/18/2010	9:32:14 AM	SiCl4 MFC set to  0.000000
5/18/2010	9:32:14 AM	Bypass solenoid MFC set to  0.000000
5/18/2010	9:32:15 AM	Tube furnace set to 0
5/18/2010	9:32:47 AM	Helium valve closed
5/18/2010	9:32:47 AM	H2 valve closed
5/18/2010	9:32:47 AM	BCl3 valve closed
5/18/2010	9:32:47 AM	PH3 valve closed
5/18/2010	9:32:47 AM	SiCl4 pre valve closed
5/18/2010	9:32:47 AM	SiCl4 post valve closed
5/18/2010	9:32:47 AM	Bubbler valve closed
5/18/2010	9:32:47 AM	Main Vac valve opened
5/18/2010	9:32:47 AM	Bypass valve opened
5/18/2010	9:32:47 AM	Helium MFC set to  0.000000
5/18/2010	9:32:47 AM	H2 MFC set to  0.000000
5/18/2010	9:32:47 AM	BCl3 MFC set to  0.000000
5/18/2010	9:32:47 AM	SiCl4 MFC set to  0.000000
5/18/2010	9:32:47 AM	Bypass solenoid MFC set to  0.000000
5/18/2010	9:32:47 AM	Tube furnace set to 0
5/18/2010	9:32:47 AM	Run finished at 9:32 AM
5/18/2010	9:32:47 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/18/2010	9:34:10 AM	Bypass valve closed
5/18/2010	9:34:11 AM	Main Vac valve closed
5/18/2010	9:34:30 AM	Bypass valve opened
5/18/2010	9:34:30 AM	Main Vac valve opened
5/18/2010	9:34:46 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/18/2010	9:34:47 AM	Recipe started at 9:34 AM
5/18/2010	9:34:47 AM	H2 valve closed
5/18/2010	9:34:47 AM	BCl3 valve closed
5/18/2010	9:34:47 AM	PH3 valve closed
5/18/2010	9:34:47 AM	SiCl4 pre valve closed
5/18/2010	9:34:47 AM	SiCl4 post valve closed
5/18/2010	9:34:47 AM	Main Vac valve closed
5/18/2010	9:34:47 AM	Bypass valve closed
5/18/2010	9:34:47 AM	Bubbler valve closed
5/18/2010	9:34:47 AM	Helium valve opened
5/18/2010	9:34:47 AM	Helium MFC set to  500.000000
5/18/2010	9:34:47 AM	H2 MFC set to  0.000000
5/18/2010	9:34:47 AM	BCl3 MFC set to  0.000000
5/18/2010	9:34:47 AM	SiCl4 MFC set to  0.000000
5/18/2010	9:34:47 AM	Bypass solenoid MFC set to  0.000000
5/18/2010	9:34:47 AM	Tube furnace set to 0
5/18/2010	9:36:08 AM	Helium valve closed
5/18/2010	9:36:08 AM	H2 valve closed
5/18/2010	9:36:08 AM	BCl3 valve closed
5/18/2010	9:36:08 AM	PH3 valve closed
5/18/2010	9:36:08 AM	SiCl4 pre valve closed
5/18/2010	9:36:08 AM	SiCl4 post valve closed
5/18/2010	9:36:08 AM	Main Vac valve closed
5/18/2010	9:36:08 AM	Bypass valve closed
5/18/2010	9:36:08 AM	Bubbler valve closed
5/18/2010	9:36:08 AM	Helium MFC set to  0.000000
5/18/2010	9:36:08 AM	H2 MFC set to  0.000000
5/18/2010	9:36:08 AM	BCl3 MFC set to  0.000000
5/18/2010	9:36:08 AM	SiCl4 MFC set to  0.000000
5/18/2010	9:36:08 AM	Bypass solenoid MFC set to  0.000000
5/18/2010	9:36:08 AM	Tube furnace set to 0
5/18/2010	9:36:08 AM	Run finished at 9:36 AM
5/18/2010	9:36:08 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/18/2010	9:36:11 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/18/2010	9:36:12 AM	Recipe started at 9:36 AM
5/18/2010	9:36:12 AM	Helium valve closed
5/18/2010	9:36:12 AM	H2 valve closed
5/18/2010	9:36:12 AM	BCl3 valve closed
5/18/2010	9:36:12 AM	PH3 valve closed
5/18/2010	9:36:12 AM	SiCl4 pre valve closed
5/18/2010	9:36:12 AM	SiCl4 post valve closed
5/18/2010	9:36:12 AM	Main Vac valve closed
5/18/2010	9:36:12 AM	Bubbler valve closed
5/18/2010	9:36:12 AM	Bypass valve opened
5/18/2010	9:36:12 AM	Helium MFC set to  0.000000
5/18/2010	9:36:12 AM	H2 MFC set to  0.000000
5/18/2010	9:36:12 AM	BCl3 MFC set to  0.000000
5/18/2010	9:36:12 AM	SiCl4 MFC set to  0.000000
5/18/2010	9:36:12 AM	Bypass solenoid MFC set to  0.000000
5/18/2010	9:36:12 AM	Tube furnace set to 0
5/18/2010	9:36:44 AM	Helium valve closed
5/18/2010	9:36:44 AM	H2 valve closed
5/18/2010	9:36:44 AM	BCl3 valve closed
5/18/2010	9:36:44 AM	PH3 valve closed
5/18/2010	9:36:44 AM	SiCl4 pre valve closed
5/18/2010	9:36:44 AM	SiCl4 post valve closed
5/18/2010	9:36:44 AM	Bubbler valve closed
5/18/2010	9:36:44 AM	Main Vac valve opened
5/18/2010	9:36:44 AM	Bypass valve opened
5/18/2010	9:36:44 AM	Helium MFC set to  0.000000
5/18/2010	9:36:44 AM	H2 MFC set to  0.000000
5/18/2010	9:36:44 AM	BCl3 MFC set to  0.000000
5/18/2010	9:36:44 AM	SiCl4 MFC set to  0.000000
5/18/2010	9:36:44 AM	Bypass solenoid MFC set to  0.000000
5/18/2010	9:36:44 AM	Tube furnace set to 0
5/18/2010	9:36:45 AM	Run finished at 9:36 AM
5/18/2010	9:36:45 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/18/2010	9:39:02 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/18/2010	9:39:02 AM	Recipe started at 9:39 AM
5/18/2010	9:39:02 AM	H2 valve closed
5/18/2010	9:39:02 AM	BCl3 valve closed
5/18/2010	9:39:02 AM	PH3 valve closed
5/18/2010	9:39:02 AM	SiCl4 pre valve closed
5/18/2010	9:39:02 AM	SiCl4 post valve closed
5/18/2010	9:39:02 AM	Main Vac valve closed
5/18/2010	9:39:02 AM	Bypass valve closed
5/18/2010	9:39:02 AM	Bubbler valve closed
5/18/2010	9:39:02 AM	Helium valve opened
5/18/2010	9:39:02 AM	Helium MFC set to  500.000000
5/18/2010	9:39:02 AM	H2 MFC set to  0.000000
5/18/2010	9:39:02 AM	BCl3 MFC set to  0.000000
5/18/2010	9:39:02 AM	SiCl4 MFC set to  0.000000
5/18/2010	9:39:02 AM	Bypass solenoid MFC set to  0.000000
5/18/2010	9:39:02 AM	Tube furnace set to 0
5/18/2010	9:40:23 AM	Helium valve closed
5/18/2010	9:40:23 AM	H2 valve closed
5/18/2010	9:40:23 AM	BCl3 valve closed
5/18/2010	9:40:23 AM	PH3 valve closed
5/18/2010	9:40:23 AM	SiCl4 pre valve closed
5/18/2010	9:40:23 AM	SiCl4 post valve closed
5/18/2010	9:40:23 AM	Main Vac valve closed
5/18/2010	9:40:23 AM	Bypass valve closed
5/18/2010	9:40:23 AM	Bubbler valve closed
5/18/2010	9:40:23 AM	Helium MFC set to  0.000000
5/18/2010	9:40:23 AM	H2 MFC set to  0.000000
5/18/2010	9:40:23 AM	BCl3 MFC set to  0.000000
5/18/2010	9:40:23 AM	SiCl4 MFC set to  0.000000
5/18/2010	9:40:23 AM	Bypass solenoid MFC set to  0.000000
5/18/2010	9:40:23 AM	Tube furnace set to 0
5/18/2010	9:40:24 AM	Run finished at 9:40 AM
5/18/2010	9:40:24 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/18/2010	9:40:27 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/18/2010	9:40:27 AM	Recipe started at 9:40 AM
5/18/2010	9:40:27 AM	Helium valve closed
5/18/2010	9:40:27 AM	H2 valve closed
5/18/2010	9:40:27 AM	BCl3 valve closed
5/18/2010	9:40:27 AM	PH3 valve closed
5/18/2010	9:40:27 AM	SiCl4 pre valve closed
5/18/2010	9:40:27 AM	SiCl4 post valve closed
5/18/2010	9:40:27 AM	Main Vac valve closed
5/18/2010	9:40:27 AM	Bubbler valve closed
5/18/2010	9:40:27 AM	Bypass valve opened
5/18/2010	9:40:27 AM	Helium MFC set to  0.000000
5/18/2010	9:40:27 AM	H2 MFC set to  0.000000
5/18/2010	9:40:27 AM	BCl3 MFC set to  0.000000
5/18/2010	9:40:27 AM	SiCl4 MFC set to  0.000000
5/18/2010	9:40:27 AM	Bypass solenoid MFC set to  0.000000
5/18/2010	9:40:28 AM	Tube furnace set to 0
5/18/2010	9:41:00 AM	Helium valve closed
5/18/2010	9:41:00 AM	H2 valve closed
5/18/2010	9:41:00 AM	BCl3 valve closed
5/18/2010	9:41:00 AM	PH3 valve closed
5/18/2010	9:41:00 AM	SiCl4 pre valve closed
5/18/2010	9:41:00 AM	SiCl4 post valve closed
5/18/2010	9:41:00 AM	Bubbler valve closed
5/18/2010	9:41:00 AM	Main Vac valve opened
5/18/2010	9:41:00 AM	Bypass valve opened
5/18/2010	9:41:00 AM	Helium MFC set to  0.000000
5/18/2010	9:41:00 AM	H2 MFC set to  0.000000
5/18/2010	9:41:00 AM	BCl3 MFC set to  0.000000
5/18/2010	9:41:00 AM	SiCl4 MFC set to  0.000000
5/18/2010	9:41:00 AM	Bypass solenoid MFC set to  0.000000
5/18/2010	9:41:00 AM	Tube furnace set to 0
5/18/2010	9:41:00 AM	Run finished at 9:41 AM
5/18/2010	9:41:00 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/18/2010	9:42:22 AM	Recipe started at 9:42 AM
5/18/2010	9:42:22 AM	Helium valve closed
5/18/2010	9:42:22 AM	BCl3 valve closed
5/18/2010	9:42:22 AM	PH3 valve closed
5/18/2010	9:42:22 AM	SiCl4 pre valve closed
5/18/2010	9:42:22 AM	SiCl4 post valve closed
5/18/2010	9:42:22 AM	Main Vac valve closed
5/18/2010	9:42:22 AM	Bypass valve closed
5/18/2010	9:42:22 AM	Bubbler valve closed
5/18/2010	9:42:22 AM	H2 valve opened
5/18/2010	9:42:22 AM	Helium MFC set to  0.000000
5/18/2010	9:42:23 AM	H2 MFC set to  500.000000
5/18/2010	9:42:23 AM	BCl3 MFC set to  0.000000
5/18/2010	9:42:23 AM	SiCl4 MFC set to  0.000000
5/18/2010	9:42:23 AM	Bypass solenoid MFC set to  0.000000
5/18/2010	9:42:23 AM	Tube furnace set to 0
5/18/2010	9:43:45 AM	Helium valve closed
5/18/2010	9:43:45 AM	BCl3 valve closed
5/18/2010	9:43:45 AM	PH3 valve closed
5/18/2010	9:43:45 AM	SiCl4 pre valve closed
5/18/2010	9:43:45 AM	SiCl4 post valve closed
5/18/2010	9:43:45 AM	Main Vac valve closed
5/18/2010	9:43:45 AM	Bypass valve closed
5/18/2010	9:43:45 AM	H2 valve opened
5/18/2010	9:43:45 AM	Bubbler valve opened
5/18/2010	9:43:45 AM	Helium MFC set to  0.000000
5/18/2010	9:43:45 AM	H2 MFC set to  500.000000
5/18/2010	9:43:45 AM	BCl3 MFC set to  0.000000
5/18/2010	9:43:45 AM	SiCl4 MFC set to  0.000000
5/18/2010	9:43:45 AM	Bypass solenoid MFC set to  0.000000
5/18/2010	9:43:45 AM	Tube furnace set to 1000
5/18/2010	10:03:45 AM	Helium valve closed
5/18/2010	10:03:45 AM	PH3 valve closed
5/18/2010	10:03:45 AM	Main Vac valve closed
5/18/2010	10:03:45 AM	Bypass valve closed
5/18/2010	10:03:45 AM	H2 valve opened
5/18/2010	10:03:45 AM	BCl3 valve opened
5/18/2010	10:03:45 AM	SiCl4 pre valve opened
5/18/2010	10:03:45 AM	SiCl4 post valve opened
5/18/2010	10:03:45 AM	Bubbler valve opened
5/18/2010	10:03:45 AM	Helium MFC set to  0.000000
5/18/2010	10:03:45 AM	H2 MFC set to  500.000000
5/18/2010	10:03:45 AM	BCl3 MFC set to  35.000000
5/18/2010	10:03:45 AM	SiCl4 MFC set to  400.000000
5/18/2010	10:03:45 AM	Bypass solenoid MFC set to  0.000000
5/18/2010	10:03:45 AM	Tube furnace set to 1000
5/18/2010	10:23:45 AM	H2 valve closed
5/18/2010	10:23:45 AM	BCl3 valve closed
5/18/2010	10:23:45 AM	PH3 valve closed
5/18/2010	10:23:45 AM	SiCl4 pre valve closed
5/18/2010	10:23:45 AM	SiCl4 post valve closed
5/18/2010	10:23:45 AM	Main Vac valve closed
5/18/2010	10:23:45 AM	Bypass valve closed
5/18/2010	10:23:45 AM	Helium valve opened
5/18/2010	10:23:45 AM	Bubbler valve opened
5/18/2010	10:23:45 AM	Helium MFC set to  500.000000
5/18/2010	10:23:45 AM	H2 MFC set to  0.000000
5/18/2010	10:23:46 AM	BCl3 MFC set to  0.000000
5/18/2010	10:23:46 AM	SiCl4 MFC set to  0.000000
5/18/2010	10:23:46 AM	Bypass solenoid MFC set to  0.000000
5/18/2010	10:23:46 AM	Tube furnace set to 0
5/18/2010	10:43:46 AM	Helium valve closed
5/18/2010	10:43:46 AM	H2 valve closed
5/18/2010	10:43:46 AM	BCl3 valve closed
5/18/2010	10:43:46 AM	PH3 valve closed
5/18/2010	10:43:46 AM	SiCl4 pre valve closed
5/18/2010	10:43:46 AM	SiCl4 post valve closed
5/18/2010	10:43:46 AM	Main Vac valve closed
5/18/2010	10:43:46 AM	Bypass valve closed
5/18/2010	10:43:46 AM	Bubbler valve closed
5/18/2010	10:43:46 AM	Helium MFC set to  0.000000
5/18/2010	10:43:46 AM	H2 MFC set to  0.000000
5/18/2010	10:43:46 AM	BCl3 MFC set to  0.000000
5/18/2010	10:43:46 AM	SiCl4 MFC set to  0.000000
5/18/2010	10:43:46 AM	Bypass solenoid MFC set to  0.000000
5/18/2010	10:43:46 AM	Tube furnace set to 0
5/18/2010	10:43:46 AM	Run finished at 10:43 AM
5/18/2010	10:46:39 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/18/2010	10:46:39 AM	Recipe started at 10:46 AM
5/18/2010	10:46:39 AM	Helium valve closed
5/18/2010	10:46:39 AM	H2 valve closed
5/18/2010	10:46:39 AM	BCl3 valve closed
5/18/2010	10:46:39 AM	PH3 valve closed
5/18/2010	10:46:39 AM	SiCl4 pre valve closed
5/18/2010	10:46:39 AM	SiCl4 post valve closed
5/18/2010	10:46:39 AM	Main Vac valve closed
5/18/2010	10:46:39 AM	Bubbler valve closed
5/18/2010	10:46:39 AM	Bypass valve opened
5/18/2010	10:46:39 AM	Helium MFC set to  0.000000
5/18/2010	10:46:39 AM	H2 MFC set to  0.000000
5/18/2010	10:46:39 AM	BCl3 MFC set to  0.000000
5/18/2010	10:46:39 AM	SiCl4 MFC set to  0.000000
5/18/2010	10:46:39 AM	Bypass solenoid MFC set to  0.000000
5/18/2010	10:46:40 AM	Tube furnace set to 0
5/18/2010	10:47:25 AM	Helium valve closed
5/18/2010	10:47:25 AM	H2 valve closed
5/18/2010	10:47:25 AM	BCl3 valve closed
5/18/2010	10:47:25 AM	PH3 valve closed
5/18/2010	10:47:25 AM	SiCl4 pre valve closed
5/18/2010	10:47:25 AM	SiCl4 post valve closed
5/18/2010	10:47:25 AM	Bubbler valve closed
5/18/2010	10:47:25 AM	Main Vac valve opened
5/18/2010	10:47:25 AM	Bypass valve opened
5/18/2010	10:47:25 AM	Helium MFC set to  0.000000
5/18/2010	10:47:25 AM	H2 MFC set to  0.000000
5/18/2010	10:47:25 AM	BCl3 MFC set to  0.000000
5/18/2010	10:47:25 AM	SiCl4 MFC set to  0.000000
5/18/2010	10:47:25 AM	Bypass solenoid MFC set to  0.000000
5/18/2010	10:47:25 AM	Tube furnace set to 0
5/18/2010	10:47:25 AM	Run finished at 10:47 AM
5/18/2010	10:47:25 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/18/2010	10:49:09 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
5/18/2010	10:49:15 AM	Recipe started at 10:49 AM
5/18/2010	10:49:15 AM	H2 valve closed
5/18/2010	10:49:15 AM	BCl3 valve closed
5/18/2010	10:49:15 AM	PH3 valve closed
5/18/2010	10:49:15 AM	SiCl4 pre valve closed
5/18/2010	10:49:15 AM	SiCl4 post valve closed
5/18/2010	10:49:15 AM	Main Vac valve closed
5/18/2010	10:49:15 AM	Bypass valve closed
5/18/2010	10:49:15 AM	Bubbler valve closed
5/18/2010	10:49:15 AM	Helium valve opened
5/18/2010	10:49:15 AM	Helium MFC set to  500.000000
5/18/2010	10:49:15 AM	H2 MFC set to  0.000000
5/18/2010	10:49:15 AM	BCl3 MFC set to  0.000000
5/18/2010	10:49:15 AM	SiCl4 MFC set to  0.000000
5/18/2010	10:49:15 AM	Bypass solenoid MFC set to  0.000000
5/18/2010	10:49:15 AM	Tube furnace set to 0
5/18/2010	10:50:36 AM	Helium valve closed
5/18/2010	10:50:36 AM	H2 valve closed
5/18/2010	10:50:36 AM	BCl3 valve closed
5/18/2010	10:50:36 AM	PH3 valve closed
5/18/2010	10:50:36 AM	SiCl4 pre valve closed
5/18/2010	10:50:36 AM	SiCl4 post valve closed
5/18/2010	10:50:36 AM	Main Vac valve closed
5/18/2010	10:50:36 AM	Bypass valve closed
5/18/2010	10:50:36 AM	Bubbler valve closed
5/18/2010	10:50:36 AM	Helium MFC set to  0.000000
5/18/2010	10:50:36 AM	H2 MFC set to  0.000000
5/18/2010	10:50:36 AM	BCl3 MFC set to  0.000000
5/18/2010	10:50:36 AM	SiCl4 MFC set to  0.000000
5/18/2010	10:50:36 AM	Bypass solenoid MFC set to  0.000000
5/18/2010	10:50:36 AM	Tube furnace set to 0
5/18/2010	10:50:51 AM	Helium valve closed
5/18/2010	10:50:51 AM	H2 valve closed
5/18/2010	10:50:51 AM	BCl3 valve closed
5/18/2010	10:50:51 AM	PH3 valve closed
5/18/2010	10:50:51 AM	SiCl4 pre valve closed
5/18/2010	10:50:51 AM	SiCl4 post valve closed
5/18/2010	10:50:51 AM	Main Vac valve closed
5/18/2010	10:50:51 AM	Bubbler valve closed
5/18/2010	10:50:51 AM	Bypass valve opened
5/18/2010	10:50:51 AM	Helium MFC set to  0.000000
5/18/2010	10:50:51 AM	H2 MFC set to  0.000000
5/18/2010	10:50:51 AM	BCl3 MFC set to  0.000000
5/18/2010	10:50:51 AM	SiCl4 MFC set to  0.000000
5/18/2010	10:50:51 AM	Bypass solenoid MFC set to  0.000000
5/18/2010	10:50:51 AM	Tube furnace set to 0
5/18/2010	10:51:23 AM	Helium valve closed
5/18/2010	10:51:23 AM	H2 valve closed
5/18/2010	10:51:23 AM	BCl3 valve closed
5/18/2010	10:51:23 AM	PH3 valve closed
5/18/2010	10:51:23 AM	SiCl4 pre valve closed
5/18/2010	10:51:23 AM	SiCl4 post valve closed
5/18/2010	10:51:23 AM	Bubbler valve closed
5/18/2010	10:51:23 AM	Main Vac valve opened
5/18/2010	10:51:23 AM	Bypass valve opened
5/18/2010	10:51:23 AM	Helium MFC set to  0.000000
5/18/2010	10:51:23 AM	H2 MFC set to  0.000000
5/18/2010	10:51:23 AM	BCl3 MFC set to  0.000000
5/18/2010	10:51:23 AM	SiCl4 MFC set to  0.000000
5/18/2010	10:51:23 AM	Bypass solenoid MFC set to  0.000000
5/18/2010	10:51:23 AM	Tube furnace set to 0
5/18/2010	10:55:09 AM	H2 valve closed
5/18/2010	10:55:09 AM	BCl3 valve closed
5/18/2010	10:55:09 AM	PH3 valve closed
5/18/2010	10:55:09 AM	SiCl4 pre valve closed
5/18/2010	10:55:09 AM	SiCl4 post valve closed
5/18/2010	10:55:09 AM	Main Vac valve closed
5/18/2010	10:55:09 AM	Bypass valve closed
5/18/2010	10:55:09 AM	Bubbler valve closed
5/18/2010	10:55:09 AM	Helium valve opened
5/18/2010	10:55:09 AM	Helium MFC set to  500.000000
5/18/2010	10:55:09 AM	H2 MFC set to  0.000000
5/18/2010	10:55:09 AM	BCl3 MFC set to  0.000000
5/18/2010	10:55:09 AM	SiCl4 MFC set to  0.000000
5/18/2010	10:55:09 AM	Bypass solenoid MFC set to  0.000000
5/18/2010	10:55:09 AM	Tube furnace set to 0
5/18/2010	10:56:30 AM	Helium valve closed
5/18/2010	10:56:30 AM	H2 valve closed
5/18/2010	10:56:30 AM	BCl3 valve closed
5/18/2010	10:56:30 AM	PH3 valve closed
5/18/2010	10:56:30 AM	SiCl4 pre valve closed
5/18/2010	10:56:30 AM	SiCl4 post valve closed
5/18/2010	10:56:30 AM	Main Vac valve closed
5/18/2010	10:56:30 AM	Bypass valve closed
5/18/2010	10:56:30 AM	Bubbler valve closed
5/18/2010	10:56:30 AM	Helium MFC set to  0.000000
5/18/2010	10:56:30 AM	H2 MFC set to  0.000000
5/18/2010	10:56:30 AM	BCl3 MFC set to  0.000000
5/18/2010	10:56:30 AM	SiCl4 MFC set to  0.000000
5/18/2010	10:56:30 AM	Bypass solenoid MFC set to  0.000000
5/18/2010	10:56:31 AM	Tube furnace set to 0
5/18/2010	10:56:46 AM	Helium valve closed
5/18/2010	10:56:46 AM	H2 valve closed
5/18/2010	10:56:46 AM	BCl3 valve closed
5/18/2010	10:56:46 AM	PH3 valve closed
5/18/2010	10:56:46 AM	SiCl4 pre valve closed
5/18/2010	10:56:46 AM	SiCl4 post valve closed
5/18/2010	10:56:46 AM	Main Vac valve closed
5/18/2010	10:56:46 AM	Bubbler valve closed
5/18/2010	10:56:46 AM	Bypass valve opened
5/18/2010	10:56:46 AM	Helium MFC set to  0.000000
5/18/2010	10:56:46 AM	H2 MFC set to  0.000000
5/18/2010	10:56:46 AM	BCl3 MFC set to  0.000000
5/18/2010	10:56:46 AM	SiCl4 MFC set to  0.000000
5/18/2010	10:56:46 AM	Bypass solenoid MFC set to  0.000000
5/18/2010	10:56:46 AM	Tube furnace set to 0
5/18/2010	10:57:18 AM	Helium valve closed
5/18/2010	10:57:18 AM	H2 valve closed
5/18/2010	10:57:18 AM	BCl3 valve closed
5/18/2010	10:57:18 AM	PH3 valve closed
5/18/2010	10:57:18 AM	SiCl4 pre valve closed
5/18/2010	10:57:18 AM	SiCl4 post valve closed
5/18/2010	10:57:18 AM	Bubbler valve closed
5/18/2010	10:57:18 AM	Main Vac valve opened
5/18/2010	10:57:18 AM	Bypass valve opened
5/18/2010	10:57:18 AM	Helium MFC set to  0.000000
5/18/2010	10:57:18 AM	H2 MFC set to  0.000000
5/18/2010	10:57:18 AM	BCl3 MFC set to  0.000000
5/18/2010	10:57:18 AM	SiCl4 MFC set to  0.000000
5/18/2010	10:57:18 AM	Bypass solenoid MFC set to  0.000000
5/18/2010	10:57:18 AM	Tube furnace set to 0
5/18/2010	10:57:55 AM	H2 valve closed
5/18/2010	10:57:55 AM	BCl3 valve closed
5/18/2010	10:57:55 AM	PH3 valve closed
5/18/2010	10:57:55 AM	SiCl4 pre valve closed
5/18/2010	10:57:55 AM	SiCl4 post valve closed
5/18/2010	10:57:55 AM	Main Vac valve closed
5/18/2010	10:57:55 AM	Bypass valve closed
5/18/2010	10:57:55 AM	Bubbler valve closed
5/18/2010	10:57:55 AM	Helium valve opened
5/18/2010	10:57:55 AM	Helium MFC set to  500.000000
5/18/2010	10:57:55 AM	H2 MFC set to  0.000000
5/18/2010	10:57:55 AM	BCl3 MFC set to  0.000000
5/18/2010	10:57:55 AM	SiCl4 MFC set to  0.000000
5/18/2010	10:57:55 AM	Bypass solenoid MFC set to  0.000000
5/18/2010	10:57:55 AM	Tube furnace set to 0
5/18/2010	10:58:29 AM	Helium valve closed
5/18/2010	10:58:29 AM	H2 valve closed
5/18/2010	10:58:29 AM	BCl3 valve closed
5/18/2010	10:58:29 AM	PH3 valve closed
5/18/2010	10:58:29 AM	SiCl4 pre valve closed
5/18/2010	10:58:29 AM	SiCl4 post valve closed
5/18/2010	10:58:29 AM	Main Vac valve closed
5/18/2010	10:58:29 AM	Bypass valve closed
5/18/2010	10:58:29 AM	Bubbler valve closed
5/18/2010	10:58:29 AM	Helium MFC set to  0.000000
5/18/2010	10:58:29 AM	H2 MFC set to  0.000000
5/18/2010	10:58:29 AM	BCl3 MFC set to  0.000000
5/18/2010	10:58:29 AM	SiCl4 MFC set to  0.000000
5/18/2010	10:58:29 AM	Bypass solenoid MFC set to  0.000000
5/18/2010	10:58:29 AM	Tube furnace set to 0
5/18/2010	10:58:31 AM	Helium valve closed
5/18/2010	10:58:31 AM	H2 valve closed
5/18/2010	10:58:31 AM	BCl3 valve closed
5/18/2010	10:58:31 AM	PH3 valve closed
5/18/2010	10:58:31 AM	SiCl4 pre valve closed
5/18/2010	10:58:31 AM	SiCl4 post valve closed
5/18/2010	10:58:31 AM	Main Vac valve closed
5/18/2010	10:58:31 AM	Bubbler valve closed
5/18/2010	10:58:31 AM	Bypass valve opened
5/18/2010	10:58:31 AM	Helium MFC set to  0.000000
5/18/2010	10:58:31 AM	H2 MFC set to  0.000000
5/18/2010	10:58:31 AM	BCl3 MFC set to  0.000000
5/18/2010	10:58:31 AM	SiCl4 MFC set to  0.000000
5/18/2010	10:58:31 AM	Bypass solenoid MFC set to  0.000000
5/18/2010	10:58:31 AM	Tube furnace set to 0
5/18/2010	10:58:57 AM	Helium valve closed
5/18/2010	10:58:57 AM	H2 valve closed
5/18/2010	10:58:57 AM	BCl3 valve closed
5/18/2010	10:58:57 AM	PH3 valve closed
5/18/2010	10:58:57 AM	SiCl4 pre valve closed
5/18/2010	10:58:57 AM	SiCl4 post valve closed
5/18/2010	10:58:57 AM	Bubbler valve closed
5/18/2010	10:58:57 AM	Main Vac valve opened
5/18/2010	10:58:57 AM	Bypass valve opened
5/18/2010	10:58:57 AM	Helium MFC set to  0.000000
5/18/2010	10:58:57 AM	H2 MFC set to  0.000000
5/18/2010	10:58:57 AM	BCl3 MFC set to  0.000000
5/18/2010	10:58:57 AM	SiCl4 MFC set to  0.000000
5/18/2010	10:58:57 AM	Bypass solenoid MFC set to  0.000000
5/18/2010	10:58:57 AM	Tube furnace set to 0
5/18/2010	10:59:06 AM	Helium valve closed
5/18/2010	10:59:06 AM	H2 valve closed
5/18/2010	10:59:06 AM	BCl3 valve closed
5/18/2010	10:59:06 AM	PH3 valve closed
5/18/2010	10:59:06 AM	SiCl4 pre valve closed
5/18/2010	10:59:06 AM	SiCl4 post valve closed
5/18/2010	10:59:06 AM	Bubbler valve closed
5/18/2010	10:59:06 AM	Main Vac valve opened
5/18/2010	10:59:06 AM	Bypass valve opened
5/18/2010	10:59:06 AM	Helium MFC set to  0.000000
5/18/2010	10:59:06 AM	H2 MFC set to  0.000000
5/18/2010	10:59:06 AM	BCl3 MFC set to  0.000000
5/18/2010	10:59:06 AM	SiCl4 MFC set to  0.000000
5/18/2010	10:59:06 AM	Bypass solenoid MFC set to  0.000000
5/18/2010	10:59:06 AM	Tube furnace set to 0
5/18/2010	10:59:07 AM	Run finished at 10:59 AM
5/18/2010	10:59:07 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
5/18/2010	10:59:44 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/18/2010	10:59:45 AM	Recipe started at 10:59 AM
5/18/2010	10:59:45 AM	H2 valve closed
5/18/2010	10:59:45 AM	BCl3 valve closed
5/18/2010	10:59:45 AM	PH3 valve closed
5/18/2010	10:59:45 AM	SiCl4 pre valve closed
5/18/2010	10:59:45 AM	SiCl4 post valve closed
5/18/2010	10:59:45 AM	Main Vac valve closed
5/18/2010	10:59:45 AM	Bypass valve closed
5/18/2010	10:59:45 AM	Bubbler valve closed
5/18/2010	10:59:45 AM	Helium valve opened
5/18/2010	10:59:45 AM	Helium MFC set to  500.000000
5/18/2010	10:59:45 AM	H2 MFC set to  0.000000
5/18/2010	10:59:45 AM	BCl3 MFC set to  0.000000
5/18/2010	10:59:45 AM	SiCl4 MFC set to  0.000000
5/18/2010	10:59:45 AM	Bypass solenoid MFC set to  0.000000
5/18/2010	10:59:45 AM	Tube furnace set to 0
5/18/2010	11:00:34 AM	Helium valve closed
5/18/2010	11:00:34 AM	H2 valve closed
5/18/2010	11:00:34 AM	BCl3 valve closed
5/18/2010	11:00:34 AM	PH3 valve closed
5/18/2010	11:00:34 AM	SiCl4 pre valve closed
5/18/2010	11:00:34 AM	SiCl4 post valve closed
5/18/2010	11:00:34 AM	Main Vac valve closed
5/18/2010	11:00:34 AM	Bypass valve closed
5/18/2010	11:00:34 AM	Bubbler valve closed
5/18/2010	11:00:34 AM	Helium MFC set to  0.000000
5/18/2010	11:00:34 AM	H2 MFC set to  0.000000
5/18/2010	11:00:34 AM	BCl3 MFC set to  0.000000
5/18/2010	11:00:34 AM	SiCl4 MFC set to  0.000000
5/18/2010	11:00:34 AM	Bypass solenoid MFC set to  0.000000
5/18/2010	11:00:34 AM	Tube furnace set to 0
5/18/2010	11:00:34 AM	Run finished at 11:00 AM
5/18/2010	11:00:34 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/18/2010	11:00:35 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/18/2010	11:00:36 AM	Recipe started at 11:00 AM
5/18/2010	11:00:36 AM	Helium valve closed
5/18/2010	11:00:36 AM	H2 valve closed
5/18/2010	11:00:36 AM	BCl3 valve closed
5/18/2010	11:00:36 AM	PH3 valve closed
5/18/2010	11:00:36 AM	SiCl4 pre valve closed
5/18/2010	11:00:36 AM	SiCl4 post valve closed
5/18/2010	11:00:36 AM	Main Vac valve closed
5/18/2010	11:00:36 AM	Bubbler valve closed
5/18/2010	11:00:36 AM	Bypass valve opened
5/18/2010	11:00:36 AM	Helium MFC set to  0.000000
5/18/2010	11:00:36 AM	H2 MFC set to  0.000000
5/18/2010	11:00:36 AM	BCl3 MFC set to  0.000000
5/18/2010	11:00:36 AM	SiCl4 MFC set to  0.000000
5/18/2010	11:00:36 AM	Bypass solenoid MFC set to  0.000000
5/18/2010	11:00:36 AM	Tube furnace set to 0
5/18/2010	11:01:04 AM	Helium valve closed
5/18/2010	11:01:04 AM	H2 valve closed
5/18/2010	11:01:04 AM	BCl3 valve closed
5/18/2010	11:01:04 AM	PH3 valve closed
5/18/2010	11:01:04 AM	SiCl4 pre valve closed
5/18/2010	11:01:04 AM	SiCl4 post valve closed
5/18/2010	11:01:04 AM	Bubbler valve closed
5/18/2010	11:01:04 AM	Main Vac valve opened
5/18/2010	11:01:04 AM	Bypass valve opened
5/18/2010	11:01:04 AM	Helium MFC set to  0.000000
5/18/2010	11:01:04 AM	H2 MFC set to  0.000000
5/18/2010	11:01:04 AM	BCl3 MFC set to  0.000000
5/18/2010	11:01:04 AM	SiCl4 MFC set to  0.000000
5/18/2010	11:01:04 AM	Bypass solenoid MFC set to  0.000000
5/18/2010	11:01:05 AM	Tube furnace set to 0
5/18/2010	11:01:05 AM	Run finished at 11:01 AM
5/18/2010	11:01:05 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/18/2010	11:01:47 AM	Bypass valve closed
5/18/2010	11:01:48 AM	Main Vac valve closed
5/18/2010	11:02:06 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/18/2010	11:02:07 AM	Recipe started at 11:02 AM
5/18/2010	11:02:07 AM	Helium valve closed
5/18/2010	11:02:07 AM	H2 valve closed
5/18/2010	11:02:07 AM	BCl3 valve closed
5/18/2010	11:02:07 AM	PH3 valve closed
5/18/2010	11:02:07 AM	SiCl4 pre valve closed
5/18/2010	11:02:07 AM	SiCl4 post valve closed
5/18/2010	11:02:07 AM	Main Vac valve closed
5/18/2010	11:02:07 AM	Bubbler valve closed
5/18/2010	11:02:07 AM	Bypass valve opened
5/18/2010	11:02:07 AM	Helium MFC set to  0.000000
5/18/2010	11:02:07 AM	H2 MFC set to  0.000000
5/18/2010	11:02:07 AM	BCl3 MFC set to  0.000000
5/18/2010	11:02:07 AM	SiCl4 MFC set to  0.000000
5/18/2010	11:02:07 AM	Bypass solenoid MFC set to  0.000000
5/18/2010	11:02:07 AM	Tube furnace set to 0
5/18/2010	11:02:07 AM	Helium valve closed
5/18/2010	11:02:07 AM	H2 valve closed
5/18/2010	11:02:07 AM	BCl3 valve closed
5/18/2010	11:02:07 AM	PH3 valve closed
5/18/2010	11:02:07 AM	SiCl4 pre valve closed
5/18/2010	11:02:07 AM	SiCl4 post valve closed
5/18/2010	11:02:07 AM	Bubbler valve closed
5/18/2010	11:02:07 AM	Main Vac valve opened
5/18/2010	11:02:07 AM	Bypass valve opened
5/18/2010	11:02:07 AM	Helium MFC set to  0.000000
5/18/2010	11:02:07 AM	H2 MFC set to  0.000000
5/18/2010	11:02:07 AM	BCl3 MFC set to  0.000000
5/18/2010	11:02:07 AM	SiCl4 MFC set to  0.000000
5/18/2010	11:02:07 AM	Bypass solenoid MFC set to  0.000000
5/18/2010	11:02:07 AM	Tube furnace set to 0
5/18/2010	11:02:08 AM	Run finished at 11:02 AM
5/18/2010	11:02:08 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/18/2010	11:07:03 AM	Recipe started at 11:07 AM
5/18/2010	11:07:03 AM	Helium valve closed
5/18/2010	11:07:03 AM	BCl3 valve closed
5/18/2010	11:07:03 AM	PH3 valve closed
5/18/2010	11:07:03 AM	SiCl4 pre valve closed
5/18/2010	11:07:03 AM	SiCl4 post valve closed
5/18/2010	11:07:03 AM	Main Vac valve closed
5/18/2010	11:07:03 AM	Bypass valve closed
5/18/2010	11:07:03 AM	Bubbler valve closed
5/18/2010	11:07:03 AM	H2 valve opened
5/18/2010	11:07:03 AM	Helium MFC set to  0.000000
5/18/2010	11:07:03 AM	H2 MFC set to  500.000000
5/18/2010	11:07:03 AM	BCl3 MFC set to  0.000000
5/18/2010	11:07:03 AM	SiCl4 MFC set to  0.000000
5/18/2010	11:07:03 AM	Bypass solenoid MFC set to  0.000000
5/18/2010	11:07:03 AM	Tube furnace set to 0
5/18/2010	11:08:25 AM	Helium valve closed
5/18/2010	11:08:25 AM	BCl3 valve closed
5/18/2010	11:08:25 AM	PH3 valve closed
5/18/2010	11:08:25 AM	SiCl4 pre valve closed
5/18/2010	11:08:25 AM	SiCl4 post valve closed
5/18/2010	11:08:25 AM	Main Vac valve closed
5/18/2010	11:08:25 AM	Bypass valve closed
5/18/2010	11:08:25 AM	H2 valve opened
5/18/2010	11:08:25 AM	Bubbler valve opened
5/18/2010	11:08:25 AM	Helium MFC set to  0.000000
5/18/2010	11:08:25 AM	H2 MFC set to  500.000000
5/18/2010	11:08:25 AM	BCl3 MFC set to  0.000000
5/18/2010	11:08:25 AM	SiCl4 MFC set to  0.000000
5/18/2010	11:08:25 AM	Bypass solenoid MFC set to  0.000000
5/18/2010	11:08:25 AM	Tube furnace set to 1000
5/18/2010	11:28:25 AM	Helium valve closed
5/18/2010	11:28:25 AM	PH3 valve closed
5/18/2010	11:28:25 AM	Main Vac valve closed
5/18/2010	11:28:25 AM	Bypass valve closed
5/18/2010	11:28:25 AM	H2 valve opened
5/18/2010	11:28:25 AM	BCl3 valve opened
5/18/2010	11:28:25 AM	SiCl4 pre valve opened
5/18/2010	11:28:25 AM	SiCl4 post valve opened
5/18/2010	11:28:25 AM	Bubbler valve opened
5/18/2010	11:28:25 AM	Helium MFC set to  0.000000
5/18/2010	11:28:25 AM	H2 MFC set to  500.000000
5/18/2010	11:28:25 AM	BCl3 MFC set to  35.000000
5/18/2010	11:28:25 AM	SiCl4 MFC set to  400.000000
5/18/2010	11:28:25 AM	Bypass solenoid MFC set to  0.000000
5/18/2010	11:28:25 AM	Tube furnace set to 1000
5/18/2010	11:38:25 AM	H2 valve closed
5/18/2010	11:38:25 AM	BCl3 valve closed
5/18/2010	11:38:25 AM	PH3 valve closed
5/18/2010	11:38:25 AM	SiCl4 pre valve closed
5/18/2010	11:38:25 AM	SiCl4 post valve closed
5/18/2010	11:38:25 AM	Main Vac valve closed
5/18/2010	11:38:25 AM	Bypass valve closed
5/18/2010	11:38:25 AM	Helium valve opened
5/18/2010	11:38:25 AM	Bubbler valve opened
5/18/2010	11:38:25 AM	Helium MFC set to  500.000000
5/18/2010	11:38:25 AM	H2 MFC set to  0.000000
5/18/2010	11:38:25 AM	BCl3 MFC set to  0.000000
5/18/2010	11:38:25 AM	SiCl4 MFC set to  0.000000
5/18/2010	11:38:25 AM	Bypass solenoid MFC set to  0.000000
5/18/2010	11:38:25 AM	Tube furnace set to 0
5/18/2010	11:58:25 AM	Helium valve closed
5/18/2010	11:58:25 AM	H2 valve closed
5/18/2010	11:58:25 AM	BCl3 valve closed
5/18/2010	11:58:25 AM	PH3 valve closed
5/18/2010	11:58:25 AM	SiCl4 pre valve closed
5/18/2010	11:58:25 AM	SiCl4 post valve closed
5/18/2010	11:58:25 AM	Main Vac valve closed
5/18/2010	11:58:25 AM	Bypass valve closed
5/18/2010	11:58:25 AM	Bubbler valve closed
5/18/2010	11:58:25 AM	Helium MFC set to  0.000000
5/18/2010	11:58:25 AM	H2 MFC set to  0.000000
5/18/2010	11:58:25 AM	BCl3 MFC set to  0.000000
5/18/2010	11:58:25 AM	SiCl4 MFC set to  0.000000
5/18/2010	11:58:25 AM	Bypass solenoid MFC set to  0.000000
5/18/2010	11:58:25 AM	Tube furnace set to 0
5/18/2010	11:58:26 AM	Run finished at 11:58 AM
5/18/2010	12:00:42 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/18/2010	12:00:43 PM	Recipe started at 12:00 PM
5/18/2010	12:00:43 PM	Helium valve closed
5/18/2010	12:00:43 PM	H2 valve closed
5/18/2010	12:00:43 PM	BCl3 valve closed
5/18/2010	12:00:43 PM	PH3 valve closed
5/18/2010	12:00:43 PM	SiCl4 pre valve closed
5/18/2010	12:00:43 PM	SiCl4 post valve closed
5/18/2010	12:00:43 PM	Main Vac valve closed
5/18/2010	12:00:43 PM	Bubbler valve closed
5/18/2010	12:00:43 PM	Bypass valve opened
5/18/2010	12:00:43 PM	Helium MFC set to  0.000000
5/18/2010	12:00:43 PM	H2 MFC set to  0.000000
5/18/2010	12:00:43 PM	BCl3 MFC set to  0.000000
5/18/2010	12:00:43 PM	SiCl4 MFC set to  0.000000
5/18/2010	12:00:43 PM	Bypass solenoid MFC set to  0.000000
5/18/2010	12:00:43 PM	Tube furnace set to 0
5/18/2010	12:01:28 PM	Helium valve closed
5/18/2010	12:01:28 PM	H2 valve closed
5/18/2010	12:01:28 PM	BCl3 valve closed
5/18/2010	12:01:28 PM	PH3 valve closed
5/18/2010	12:01:28 PM	SiCl4 pre valve closed
5/18/2010	12:01:28 PM	SiCl4 post valve closed
5/18/2010	12:01:28 PM	Bubbler valve closed
5/18/2010	12:01:28 PM	Main Vac valve opened
5/18/2010	12:01:28 PM	Bypass valve opened
5/18/2010	12:01:28 PM	Helium MFC set to  0.000000
5/18/2010	12:01:28 PM	H2 MFC set to  0.000000
5/18/2010	12:01:29 PM	BCl3 MFC set to  0.000000
5/18/2010	12:01:29 PM	SiCl4 MFC set to  0.000000
5/18/2010	12:01:29 PM	Bypass solenoid MFC set to  0.000000
5/18/2010	12:01:29 PM	Tube furnace set to 0
5/18/2010	12:01:29 PM	Run finished at 12:01 PM
5/18/2010	12:01:29 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/18/2010	12:02:07 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
5/18/2010	12:02:13 PM	Recipe started at 12:02 PM
5/18/2010	12:02:13 PM	H2 valve closed
5/18/2010	12:02:13 PM	BCl3 valve closed
5/18/2010	12:02:13 PM	PH3 valve closed
5/18/2010	12:02:13 PM	SiCl4 pre valve closed
5/18/2010	12:02:13 PM	SiCl4 post valve closed
5/18/2010	12:02:13 PM	Main Vac valve closed
5/18/2010	12:02:13 PM	Bypass valve closed
5/18/2010	12:02:13 PM	Bubbler valve closed
5/18/2010	12:02:13 PM	Helium valve opened
5/18/2010	12:02:13 PM	Helium MFC set to  500.000000
5/18/2010	12:02:13 PM	H2 MFC set to  0.000000
5/18/2010	12:02:13 PM	BCl3 MFC set to  0.000000
5/18/2010	12:02:13 PM	SiCl4 MFC set to  0.000000
5/18/2010	12:02:13 PM	Bypass solenoid MFC set to  0.000000
5/18/2010	12:02:13 PM	Tube furnace set to 0
5/18/2010	12:03:33 PM	Helium valve closed
5/18/2010	12:03:33 PM	H2 valve closed
5/18/2010	12:03:33 PM	BCl3 valve closed
5/18/2010	12:03:33 PM	PH3 valve closed
5/18/2010	12:03:33 PM	SiCl4 pre valve closed
5/18/2010	12:03:33 PM	SiCl4 post valve closed
5/18/2010	12:03:33 PM	Main Vac valve closed
5/18/2010	12:03:33 PM	Bypass valve closed
5/18/2010	12:03:33 PM	Bubbler valve closed
5/18/2010	12:03:33 PM	Helium MFC set to  0.000000
5/18/2010	12:03:33 PM	H2 MFC set to  0.000000
5/18/2010	12:03:33 PM	BCl3 MFC set to  0.000000
5/18/2010	12:03:33 PM	SiCl4 MFC set to  0.000000
5/18/2010	12:03:33 PM	Bypass solenoid MFC set to  0.000000
5/18/2010	12:03:33 PM	Tube furnace set to 0
5/18/2010	12:03:48 PM	Helium valve closed
5/18/2010	12:03:48 PM	H2 valve closed
5/18/2010	12:03:48 PM	BCl3 valve closed
5/18/2010	12:03:48 PM	PH3 valve closed
5/18/2010	12:03:48 PM	SiCl4 pre valve closed
5/18/2010	12:03:48 PM	SiCl4 post valve closed
5/18/2010	12:03:48 PM	Main Vac valve closed
5/18/2010	12:03:48 PM	Bubbler valve closed
5/18/2010	12:03:48 PM	Bypass valve opened
5/18/2010	12:03:48 PM	Helium MFC set to  0.000000
5/18/2010	12:03:48 PM	H2 MFC set to  0.000000
5/18/2010	12:03:48 PM	BCl3 MFC set to  0.000000
5/18/2010	12:03:48 PM	SiCl4 MFC set to  0.000000
5/18/2010	12:03:48 PM	Bypass solenoid MFC set to  0.000000
5/18/2010	12:03:49 PM	Tube furnace set to 0
5/18/2010	12:04:20 PM	Helium valve closed
5/18/2010	12:04:20 PM	H2 valve closed
5/18/2010	12:04:20 PM	BCl3 valve closed
5/18/2010	12:04:20 PM	PH3 valve closed
5/18/2010	12:04:20 PM	SiCl4 pre valve closed
5/18/2010	12:04:20 PM	SiCl4 post valve closed
5/18/2010	12:04:20 PM	Bubbler valve closed
5/18/2010	12:04:20 PM	Main Vac valve opened
5/18/2010	12:04:20 PM	Bypass valve opened
5/18/2010	12:04:20 PM	Helium MFC set to  0.000000
5/18/2010	12:04:20 PM	H2 MFC set to  0.000000
5/18/2010	12:04:20 PM	BCl3 MFC set to  0.000000
5/18/2010	12:04:20 PM	SiCl4 MFC set to  0.000000
5/18/2010	12:04:20 PM	Bypass solenoid MFC set to  0.000000
5/18/2010	12:04:21 PM	Tube furnace set to 0
5/18/2010	12:09:21 PM	H2 valve closed
5/18/2010	12:09:21 PM	BCl3 valve closed
5/18/2010	12:09:21 PM	PH3 valve closed
5/18/2010	12:09:21 PM	SiCl4 pre valve closed
5/18/2010	12:09:21 PM	SiCl4 post valve closed
5/18/2010	12:09:21 PM	Main Vac valve closed
5/18/2010	12:09:21 PM	Bypass valve closed
5/18/2010	12:09:21 PM	Bubbler valve closed
5/18/2010	12:09:21 PM	Helium valve opened
5/18/2010	12:09:21 PM	Helium MFC set to  500.000000
5/18/2010	12:09:21 PM	H2 MFC set to  0.000000
5/18/2010	12:09:21 PM	BCl3 MFC set to  0.000000
5/18/2010	12:09:21 PM	SiCl4 MFC set to  0.000000
5/18/2010	12:09:21 PM	Bypass solenoid MFC set to  0.000000
5/18/2010	12:09:21 PM	Tube furnace set to 0
5/18/2010	12:10:39 PM	Helium valve closed
5/18/2010	12:10:39 PM	H2 valve closed
5/18/2010	12:10:39 PM	BCl3 valve closed
5/18/2010	12:10:39 PM	PH3 valve closed
5/18/2010	12:10:39 PM	SiCl4 pre valve closed
5/18/2010	12:10:39 PM	SiCl4 post valve closed
5/18/2010	12:10:39 PM	Main Vac valve closed
5/18/2010	12:10:39 PM	Bypass valve closed
5/18/2010	12:10:39 PM	Bubbler valve closed
5/18/2010	12:10:39 PM	Helium MFC set to  0.000000
5/18/2010	12:10:39 PM	H2 MFC set to  0.000000
5/18/2010	12:10:39 PM	BCl3 MFC set to  0.000000
5/18/2010	12:10:39 PM	SiCl4 MFC set to  0.000000
5/18/2010	12:10:39 PM	Bypass solenoid MFC set to  0.000000
5/18/2010	12:10:39 PM	Tube furnace set to 0
5/18/2010	12:10:54 PM	Helium valve closed
5/18/2010	12:10:54 PM	H2 valve closed
5/18/2010	12:10:55 PM	BCl3 valve closed
5/18/2010	12:10:55 PM	PH3 valve closed
5/18/2010	12:10:55 PM	SiCl4 pre valve closed
5/18/2010	12:10:55 PM	SiCl4 post valve closed
5/18/2010	12:10:55 PM	Main Vac valve closed
5/18/2010	12:10:55 PM	Bubbler valve closed
5/18/2010	12:10:55 PM	Bypass valve opened
5/18/2010	12:10:55 PM	Helium MFC set to  0.000000
5/18/2010	12:10:55 PM	H2 MFC set to  0.000000
5/18/2010	12:10:55 PM	BCl3 MFC set to  0.000000
5/18/2010	12:10:55 PM	SiCl4 MFC set to  0.000000
5/18/2010	12:10:55 PM	Bypass solenoid MFC set to  0.000000
5/18/2010	12:10:55 PM	Tube furnace set to 0
5/18/2010	12:11:26 PM	Helium valve closed
5/18/2010	12:11:26 PM	H2 valve closed
5/18/2010	12:11:26 PM	BCl3 valve closed
5/18/2010	12:11:26 PM	PH3 valve closed
5/18/2010	12:11:26 PM	SiCl4 pre valve closed
5/18/2010	12:11:26 PM	SiCl4 post valve closed
5/18/2010	12:11:26 PM	Bubbler valve closed
5/18/2010	12:11:26 PM	Main Vac valve opened
5/18/2010	12:11:26 PM	Bypass valve opened
5/18/2010	12:11:26 PM	Helium MFC set to  0.000000
5/18/2010	12:11:26 PM	H2 MFC set to  0.000000
5/18/2010	12:11:26 PM	BCl3 MFC set to  0.000000
5/18/2010	12:11:26 PM	SiCl4 MFC set to  0.000000
5/18/2010	12:11:26 PM	Bypass solenoid MFC set to  0.000000
5/18/2010	12:11:26 PM	Tube furnace set to 0
5/18/2010	12:16:26 PM	H2 valve closed
5/18/2010	12:16:26 PM	BCl3 valve closed
5/18/2010	12:16:26 PM	PH3 valve closed
5/18/2010	12:16:26 PM	SiCl4 pre valve closed
5/18/2010	12:16:26 PM	SiCl4 post valve closed
5/18/2010	12:16:26 PM	Main Vac valve closed
5/18/2010	12:16:26 PM	Bypass valve closed
5/18/2010	12:16:26 PM	Bubbler valve closed
5/18/2010	12:16:26 PM	Helium valve opened
5/18/2010	12:16:26 PM	Helium MFC set to  500.000000
5/18/2010	12:16:26 PM	H2 MFC set to  0.000000
5/18/2010	12:16:26 PM	BCl3 MFC set to  0.000000
5/18/2010	12:16:26 PM	SiCl4 MFC set to  0.000000
5/18/2010	12:16:26 PM	Bypass solenoid MFC set to  0.000000
5/18/2010	12:16:26 PM	Tube furnace set to 0
5/18/2010	12:17:44 PM	Helium valve closed
5/18/2010	12:17:44 PM	H2 valve closed
5/18/2010	12:17:44 PM	BCl3 valve closed
5/18/2010	12:17:44 PM	PH3 valve closed
5/18/2010	12:17:44 PM	SiCl4 pre valve closed
5/18/2010	12:17:44 PM	SiCl4 post valve closed
5/18/2010	12:17:44 PM	Main Vac valve closed
5/18/2010	12:17:44 PM	Bypass valve closed
5/18/2010	12:17:44 PM	Bubbler valve closed
5/18/2010	12:17:44 PM	Helium MFC set to  0.000000
5/18/2010	12:17:44 PM	H2 MFC set to  0.000000
5/18/2010	12:17:44 PM	BCl3 MFC set to  0.000000
5/18/2010	12:17:44 PM	SiCl4 MFC set to  0.000000
5/18/2010	12:17:44 PM	Bypass solenoid MFC set to  0.000000
5/18/2010	12:17:45 PM	Tube furnace set to 0
5/18/2010	12:18:00 PM	Helium valve closed
5/18/2010	12:18:00 PM	H2 valve closed
5/18/2010	12:18:00 PM	BCl3 valve closed
5/18/2010	12:18:00 PM	PH3 valve closed
5/18/2010	12:18:00 PM	SiCl4 pre valve closed
5/18/2010	12:18:00 PM	SiCl4 post valve closed
5/18/2010	12:18:00 PM	Main Vac valve closed
5/18/2010	12:18:00 PM	Bubbler valve closed
5/18/2010	12:18:00 PM	Bypass valve opened
5/18/2010	12:18:00 PM	Helium MFC set to  0.000000
5/18/2010	12:18:00 PM	H2 MFC set to  0.000000
5/18/2010	12:18:00 PM	BCl3 MFC set to  0.000000
5/18/2010	12:18:00 PM	SiCl4 MFC set to  0.000000
5/18/2010	12:18:00 PM	Bypass solenoid MFC set to  0.000000
5/18/2010	12:18:00 PM	Tube furnace set to 0
5/18/2010	12:18:30 PM	Helium valve closed
5/18/2010	12:18:30 PM	H2 valve closed
5/18/2010	12:18:30 PM	BCl3 valve closed
5/18/2010	12:18:30 PM	PH3 valve closed
5/18/2010	12:18:30 PM	SiCl4 pre valve closed
5/18/2010	12:18:30 PM	SiCl4 post valve closed
5/18/2010	12:18:30 PM	Bubbler valve closed
5/18/2010	12:18:31 PM	Main Vac valve opened
5/18/2010	12:18:31 PM	Bypass valve opened
5/18/2010	12:18:31 PM	Helium MFC set to  0.000000
5/18/2010	12:18:31 PM	H2 MFC set to  0.000000
5/18/2010	12:18:31 PM	BCl3 MFC set to  0.000000
5/18/2010	12:18:31 PM	SiCl4 MFC set to  0.000000
5/18/2010	12:18:31 PM	Bypass solenoid MFC set to  0.000000
5/18/2010	12:18:31 PM	Tube furnace set to 0
5/18/2010	12:18:35 PM	Helium valve closed
5/18/2010	12:18:35 PM	H2 valve closed
5/18/2010	12:18:35 PM	BCl3 valve closed
5/18/2010	12:18:35 PM	PH3 valve closed
5/18/2010	12:18:35 PM	SiCl4 pre valve closed
5/18/2010	12:18:35 PM	SiCl4 post valve closed
5/18/2010	12:18:35 PM	Bubbler valve closed
5/18/2010	12:18:35 PM	Main Vac valve opened
5/18/2010	12:18:35 PM	Bypass valve opened
5/18/2010	12:18:35 PM	Helium MFC set to  0.000000
5/18/2010	12:18:35 PM	H2 MFC set to  0.000000
5/18/2010	12:18:35 PM	BCl3 MFC set to  0.000000
5/18/2010	12:18:35 PM	SiCl4 MFC set to  0.000000
5/18/2010	12:18:35 PM	Bypass solenoid MFC set to  0.000000
5/18/2010	12:18:36 PM	Tube furnace set to 0
5/18/2010	12:18:37 PM	Run finished at 12:18 PM
5/18/2010	12:18:37 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
5/18/2010	12:19:01 PM	Bypass valve closed
5/18/2010	12:19:01 PM	Main Vac valve closed
5/18/2010	12:19:12 PM	Bypass valve opened
5/18/2010	12:19:12 PM	Main Vac valve opened
5/18/2010	12:20:22 PM	Recipe started at 12:20 PM
5/18/2010	12:20:22 PM	Helium valve closed
5/18/2010	12:20:22 PM	BCl3 valve closed
5/18/2010	12:20:22 PM	PH3 valve closed
5/18/2010	12:20:22 PM	SiCl4 pre valve closed
5/18/2010	12:20:22 PM	SiCl4 post valve closed
5/18/2010	12:20:22 PM	Main Vac valve closed
5/18/2010	12:20:22 PM	Bypass valve closed
5/18/2010	12:20:22 PM	Bubbler valve closed
5/18/2010	12:20:22 PM	H2 valve opened
5/18/2010	12:20:22 PM	Helium MFC set to  0.000000
5/18/2010	12:20:22 PM	H2 MFC set to  500.000000
5/18/2010	12:20:22 PM	BCl3 MFC set to  0.000000
5/18/2010	12:20:22 PM	SiCl4 MFC set to  0.000000
5/18/2010	12:20:22 PM	Bypass solenoid MFC set to  0.000000
5/18/2010	12:20:22 PM	Tube furnace set to 0
5/18/2010	12:21:41 PM	Helium valve closed
5/18/2010	12:21:41 PM	BCl3 valve closed
5/18/2010	12:21:41 PM	PH3 valve closed
5/18/2010	12:21:41 PM	SiCl4 pre valve closed
5/18/2010	12:21:41 PM	SiCl4 post valve closed
5/18/2010	12:21:41 PM	Main Vac valve closed
5/18/2010	12:21:41 PM	Bypass valve closed
5/18/2010	12:21:41 PM	H2 valve opened
5/18/2010	12:21:41 PM	Bubbler valve opened
5/18/2010	12:21:41 PM	Helium MFC set to  0.000000
5/18/2010	12:21:41 PM	H2 MFC set to  500.000000
5/18/2010	12:21:41 PM	BCl3 MFC set to  0.000000
5/18/2010	12:21:41 PM	SiCl4 MFC set to  0.000000
5/18/2010	12:21:41 PM	Bypass solenoid MFC set to  0.000000
5/18/2010	12:21:41 PM	Tube furnace set to 1000
5/18/2010	12:41:41 PM	Helium valve closed
5/18/2010	12:41:41 PM	PH3 valve closed
5/18/2010	12:41:41 PM	Main Vac valve closed
5/18/2010	12:41:41 PM	Bypass valve closed
5/18/2010	12:41:41 PM	H2 valve opened
5/18/2010	12:41:41 PM	BCl3 valve opened
5/18/2010	12:41:41 PM	SiCl4 pre valve opened
5/18/2010	12:41:41 PM	SiCl4 post valve opened
5/18/2010	12:41:41 PM	Bubbler valve opened
5/18/2010	12:41:41 PM	Helium MFC set to  0.000000
5/18/2010	12:41:41 PM	H2 MFC set to  500.000000
5/18/2010	12:41:41 PM	BCl3 MFC set to  35.000000
5/18/2010	12:41:41 PM	SiCl4 MFC set to  450.000000
5/18/2010	12:41:41 PM	Bypass solenoid MFC set to  0.000000
5/18/2010	12:41:41 PM	Tube furnace set to 1000
5/18/2010	12:51:41 PM	H2 valve closed
5/18/2010	12:51:41 PM	BCl3 valve closed
5/18/2010	12:51:41 PM	PH3 valve closed
5/18/2010	12:51:41 PM	SiCl4 pre valve closed
5/18/2010	12:51:41 PM	SiCl4 post valve closed
5/18/2010	12:51:41 PM	Main Vac valve closed
5/18/2010	12:51:41 PM	Bypass valve closed
5/18/2010	12:51:41 PM	Helium valve opened
5/18/2010	12:51:41 PM	Bubbler valve opened
5/18/2010	12:51:41 PM	Helium MFC set to  500.000000
5/18/2010	12:51:41 PM	H2 MFC set to  0.000000
5/18/2010	12:51:41 PM	BCl3 MFC set to  0.000000
5/18/2010	12:51:41 PM	SiCl4 MFC set to  0.000000
5/18/2010	12:51:41 PM	Bypass solenoid MFC set to  0.000000
5/18/2010	12:51:41 PM	Tube furnace set to 0
5/18/2010	1:11:41 PM	Helium valve closed
5/18/2010	1:11:41 PM	H2 valve closed
5/18/2010	1:11:41 PM	BCl3 valve closed
5/18/2010	1:11:41 PM	PH3 valve closed
5/18/2010	1:11:41 PM	SiCl4 pre valve closed
5/18/2010	1:11:41 PM	SiCl4 post valve closed
5/18/2010	1:11:41 PM	Main Vac valve closed
5/18/2010	1:11:41 PM	Bypass valve closed
5/18/2010	1:11:41 PM	Bubbler valve closed
5/18/2010	1:11:41 PM	Helium MFC set to  0.000000
5/18/2010	1:11:41 PM	H2 MFC set to  0.000000
5/18/2010	1:11:41 PM	BCl3 MFC set to  0.000000
5/18/2010	1:11:41 PM	SiCl4 MFC set to  0.000000
5/18/2010	1:11:41 PM	Bypass solenoid MFC set to  0.000000
5/18/2010	1:11:41 PM	Tube furnace set to 0
5/18/2010	1:11:41 PM	Run finished at 1:11 PM
5/18/2010	1:45:53 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/18/2010	1:45:54 PM	Recipe started at 1:45 PM
5/18/2010	1:45:54 PM	Helium valve closed
5/18/2010	1:45:54 PM	H2 valve closed
5/18/2010	1:45:54 PM	BCl3 valve closed
5/18/2010	1:45:54 PM	PH3 valve closed
5/18/2010	1:45:54 PM	SiCl4 pre valve closed
5/18/2010	1:45:54 PM	SiCl4 post valve closed
5/18/2010	1:45:54 PM	Main Vac valve closed
5/18/2010	1:45:54 PM	Bubbler valve closed
5/18/2010	1:45:54 PM	Bypass valve opened
5/18/2010	1:45:54 PM	Helium MFC set to  0.000000
5/18/2010	1:45:54 PM	H2 MFC set to  0.000000
5/18/2010	1:45:54 PM	BCl3 MFC set to  0.000000
5/18/2010	1:45:54 PM	SiCl4 MFC set to  0.000000
5/18/2010	1:45:54 PM	Bypass solenoid MFC set to  0.000000
5/18/2010	1:45:54 PM	Tube furnace set to 0
5/18/2010	1:46:41 PM	Helium valve closed
5/18/2010	1:46:41 PM	H2 valve closed
5/18/2010	1:46:41 PM	BCl3 valve closed
5/18/2010	1:46:41 PM	PH3 valve closed
5/18/2010	1:46:41 PM	SiCl4 pre valve closed
5/18/2010	1:46:41 PM	SiCl4 post valve closed
5/18/2010	1:46:41 PM	Bubbler valve closed
5/18/2010	1:46:41 PM	Main Vac valve opened
5/18/2010	1:46:41 PM	Bypass valve opened
5/18/2010	1:46:41 PM	Helium MFC set to  0.000000
5/18/2010	1:46:41 PM	H2 MFC set to  0.000000
5/18/2010	1:46:41 PM	BCl3 MFC set to  0.000000
5/18/2010	1:46:41 PM	SiCl4 MFC set to  0.000000
5/18/2010	1:46:41 PM	Bypass solenoid MFC set to  0.000000
5/18/2010	1:46:41 PM	Tube furnace set to 0
5/18/2010	1:46:41 PM	Run finished at 1:46 PM
5/18/2010	1:46:41 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/18/2010	1:46:50 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
5/18/2010	1:46:56 PM	Recipe started at 1:46 PM
5/18/2010	1:46:56 PM	H2 valve closed
5/18/2010	1:46:56 PM	BCl3 valve closed
5/18/2010	1:46:56 PM	PH3 valve closed
5/18/2010	1:46:56 PM	SiCl4 pre valve closed
5/18/2010	1:46:56 PM	SiCl4 post valve closed
5/18/2010	1:46:56 PM	Main Vac valve closed
5/18/2010	1:46:56 PM	Bypass valve closed
5/18/2010	1:46:56 PM	Bubbler valve closed
5/18/2010	1:46:56 PM	Helium valve opened
5/18/2010	1:46:56 PM	Helium MFC set to  500.000000
5/18/2010	1:46:56 PM	H2 MFC set to  0.000000
5/18/2010	1:46:56 PM	BCl3 MFC set to  0.000000
5/18/2010	1:46:56 PM	SiCl4 MFC set to  0.000000
5/18/2010	1:46:56 PM	Bypass solenoid MFC set to  0.000000
5/18/2010	1:46:56 PM	Tube furnace set to 0
5/18/2010	1:48:18 PM	Helium valve closed
5/18/2010	1:48:18 PM	H2 valve closed
5/18/2010	1:48:18 PM	BCl3 valve closed
5/18/2010	1:48:18 PM	PH3 valve closed
5/18/2010	1:48:18 PM	SiCl4 pre valve closed
5/18/2010	1:48:18 PM	SiCl4 post valve closed
5/18/2010	1:48:18 PM	Main Vac valve closed
5/18/2010	1:48:18 PM	Bypass valve closed
5/18/2010	1:48:18 PM	Bubbler valve closed
5/18/2010	1:48:18 PM	Helium MFC set to  0.000000
5/18/2010	1:48:18 PM	H2 MFC set to  0.000000
5/18/2010	1:48:18 PM	BCl3 MFC set to  0.000000
5/18/2010	1:48:18 PM	SiCl4 MFC set to  0.000000
5/18/2010	1:48:18 PM	Bypass solenoid MFC set to  0.000000
5/18/2010	1:48:18 PM	Tube furnace set to 0
5/18/2010	1:48:33 PM	Helium valve closed
5/18/2010	1:48:33 PM	H2 valve closed
5/18/2010	1:48:33 PM	BCl3 valve closed
5/18/2010	1:48:33 PM	PH3 valve closed
5/18/2010	1:48:33 PM	SiCl4 pre valve closed
5/18/2010	1:48:33 PM	SiCl4 post valve closed
5/18/2010	1:48:33 PM	Main Vac valve closed
5/18/2010	1:48:33 PM	Bubbler valve closed
5/18/2010	1:48:33 PM	Bypass valve opened
5/18/2010	1:48:33 PM	Helium MFC set to  0.000000
5/18/2010	1:48:33 PM	H2 MFC set to  0.000000
5/18/2010	1:48:33 PM	BCl3 MFC set to  0.000000
5/18/2010	1:48:33 PM	SiCl4 MFC set to  0.000000
5/18/2010	1:48:33 PM	Bypass solenoid MFC set to  0.000000
5/18/2010	1:48:33 PM	Tube furnace set to 0
5/18/2010	1:49:06 PM	Helium valve closed
5/18/2010	1:49:06 PM	H2 valve closed
5/18/2010	1:49:06 PM	BCl3 valve closed
5/18/2010	1:49:06 PM	PH3 valve closed
5/18/2010	1:49:06 PM	SiCl4 pre valve closed
5/18/2010	1:49:06 PM	SiCl4 post valve closed
5/18/2010	1:49:06 PM	Bubbler valve closed
5/18/2010	1:49:06 PM	Main Vac valve opened
5/18/2010	1:49:06 PM	Bypass valve opened
5/18/2010	1:49:06 PM	Helium MFC set to  0.000000
5/18/2010	1:49:06 PM	H2 MFC set to  0.000000
5/18/2010	1:49:06 PM	BCl3 MFC set to  0.000000
5/18/2010	1:49:06 PM	SiCl4 MFC set to  0.000000
5/18/2010	1:49:06 PM	Bypass solenoid MFC set to  0.000000
5/18/2010	1:49:06 PM	Tube furnace set to 0
5/18/2010	1:54:06 PM	H2 valve closed
5/18/2010	1:54:06 PM	BCl3 valve closed
5/18/2010	1:54:06 PM	PH3 valve closed
5/18/2010	1:54:06 PM	SiCl4 pre valve closed
5/18/2010	1:54:06 PM	SiCl4 post valve closed
5/18/2010	1:54:06 PM	Main Vac valve closed
5/18/2010	1:54:06 PM	Bypass valve closed
5/18/2010	1:54:06 PM	Bubbler valve closed
5/18/2010	1:54:06 PM	Helium valve opened
5/18/2010	1:54:06 PM	Helium MFC set to  500.000000
5/18/2010	1:54:06 PM	H2 MFC set to  0.000000
5/18/2010	1:54:06 PM	BCl3 MFC set to  0.000000
5/18/2010	1:54:06 PM	SiCl4 MFC set to  0.000000
5/18/2010	1:54:06 PM	Bypass solenoid MFC set to  0.000000
5/18/2010	1:54:06 PM	Tube furnace set to 0
5/18/2010	1:55:27 PM	Helium valve closed
5/18/2010	1:55:27 PM	H2 valve closed
5/18/2010	1:55:27 PM	BCl3 valve closed
5/18/2010	1:55:27 PM	PH3 valve closed
5/18/2010	1:55:27 PM	SiCl4 pre valve closed
5/18/2010	1:55:27 PM	SiCl4 post valve closed
5/18/2010	1:55:27 PM	Main Vac valve closed
5/18/2010	1:55:27 PM	Bypass valve closed
5/18/2010	1:55:27 PM	Bubbler valve closed
5/18/2010	1:55:27 PM	Helium MFC set to  0.000000
5/18/2010	1:55:27 PM	H2 MFC set to  0.000000
5/18/2010	1:55:27 PM	BCl3 MFC set to  0.000000
5/18/2010	1:55:27 PM	SiCl4 MFC set to  0.000000
5/18/2010	1:55:27 PM	Bypass solenoid MFC set to  0.000000
5/18/2010	1:55:27 PM	Tube furnace set to 0
5/18/2010	1:55:42 PM	Helium valve closed
5/18/2010	1:55:42 PM	H2 valve closed
5/18/2010	1:55:42 PM	BCl3 valve closed
5/18/2010	1:55:42 PM	PH3 valve closed
5/18/2010	1:55:42 PM	SiCl4 pre valve closed
5/18/2010	1:55:42 PM	SiCl4 post valve closed
5/18/2010	1:55:42 PM	Main Vac valve closed
5/18/2010	1:55:42 PM	Bubbler valve closed
5/18/2010	1:55:42 PM	Bypass valve opened
5/18/2010	1:55:42 PM	Helium MFC set to  0.000000
5/18/2010	1:55:42 PM	H2 MFC set to  0.000000
5/18/2010	1:55:42 PM	BCl3 MFC set to  0.000000
5/18/2010	1:55:42 PM	SiCl4 MFC set to  0.000000
5/18/2010	1:55:42 PM	Bypass solenoid MFC set to  0.000000
5/18/2010	1:55:42 PM	Tube furnace set to 0
5/18/2010	1:56:14 PM	Helium valve closed
5/18/2010	1:56:14 PM	H2 valve closed
5/18/2010	1:56:15 PM	BCl3 valve closed
5/18/2010	1:56:15 PM	PH3 valve closed
5/18/2010	1:56:15 PM	SiCl4 pre valve closed
5/18/2010	1:56:15 PM	SiCl4 post valve closed
5/18/2010	1:56:15 PM	Bubbler valve closed
5/18/2010	1:56:15 PM	Main Vac valve opened
5/18/2010	1:56:15 PM	Bypass valve opened
5/18/2010	1:56:15 PM	Helium MFC set to  0.000000
5/18/2010	1:56:15 PM	H2 MFC set to  0.000000
5/18/2010	1:56:15 PM	BCl3 MFC set to  0.000000
5/18/2010	1:56:15 PM	SiCl4 MFC set to  0.000000
5/18/2010	1:56:15 PM	Bypass solenoid MFC set to  0.000000
5/18/2010	1:56:15 PM	Tube furnace set to 0
5/18/2010	1:57:04 PM	H2 valve closed
5/18/2010	1:57:04 PM	BCl3 valve closed
5/18/2010	1:57:04 PM	PH3 valve closed
5/18/2010	1:57:04 PM	SiCl4 pre valve closed
5/18/2010	1:57:04 PM	SiCl4 post valve closed
5/18/2010	1:57:04 PM	Main Vac valve closed
5/18/2010	1:57:04 PM	Bypass valve closed
5/18/2010	1:57:04 PM	Bubbler valve closed
5/18/2010	1:57:04 PM	Helium valve opened
5/18/2010	1:57:04 PM	Helium MFC set to  500.000000
5/18/2010	1:57:04 PM	H2 MFC set to  0.000000
5/18/2010	1:57:04 PM	BCl3 MFC set to  0.000000
5/18/2010	1:57:04 PM	SiCl4 MFC set to  0.000000
5/18/2010	1:57:04 PM	Bypass solenoid MFC set to  0.000000
5/18/2010	1:57:04 PM	Tube furnace set to 0
5/18/2010	1:58:25 PM	Helium valve closed
5/18/2010	1:58:25 PM	H2 valve closed
5/18/2010	1:58:25 PM	BCl3 valve closed
5/18/2010	1:58:25 PM	PH3 valve closed
5/18/2010	1:58:25 PM	SiCl4 pre valve closed
5/18/2010	1:58:25 PM	SiCl4 post valve closed
5/18/2010	1:58:25 PM	Main Vac valve closed
5/18/2010	1:58:25 PM	Bypass valve closed
5/18/2010	1:58:25 PM	Bubbler valve closed
5/18/2010	1:58:25 PM	Helium MFC set to  0.000000
5/18/2010	1:58:25 PM	H2 MFC set to  0.000000
5/18/2010	1:58:25 PM	BCl3 MFC set to  0.000000
5/18/2010	1:58:25 PM	SiCl4 MFC set to  0.000000
5/18/2010	1:58:25 PM	Bypass solenoid MFC set to  0.000000
5/18/2010	1:58:25 PM	Tube furnace set to 0
5/18/2010	1:58:40 PM	Helium valve closed
5/18/2010	1:58:40 PM	H2 valve closed
5/18/2010	1:58:40 PM	BCl3 valve closed
5/18/2010	1:58:40 PM	PH3 valve closed
5/18/2010	1:58:40 PM	SiCl4 pre valve closed
5/18/2010	1:58:40 PM	SiCl4 post valve closed
5/18/2010	1:58:40 PM	Main Vac valve closed
5/18/2010	1:58:40 PM	Bubbler valve closed
5/18/2010	1:58:40 PM	Bypass valve opened
5/18/2010	1:58:40 PM	Helium MFC set to  0.000000
5/18/2010	1:58:40 PM	H2 MFC set to  0.000000
5/18/2010	1:58:40 PM	BCl3 MFC set to  0.000000
5/18/2010	1:58:40 PM	SiCl4 MFC set to  0.000000
5/18/2010	1:58:40 PM	Bypass solenoid MFC set to  0.000000
5/18/2010	1:58:40 PM	Tube furnace set to 0
5/18/2010	1:59:12 PM	Helium valve closed
5/18/2010	1:59:12 PM	H2 valve closed
5/18/2010	1:59:12 PM	BCl3 valve closed
5/18/2010	1:59:12 PM	PH3 valve closed
5/18/2010	1:59:12 PM	SiCl4 pre valve closed
5/18/2010	1:59:12 PM	SiCl4 post valve closed
5/18/2010	1:59:12 PM	Bubbler valve closed
5/18/2010	1:59:12 PM	Main Vac valve opened
5/18/2010	1:59:12 PM	Bypass valve opened
5/18/2010	1:59:12 PM	Helium MFC set to  0.000000
5/18/2010	1:59:12 PM	H2 MFC set to  0.000000
5/18/2010	1:59:12 PM	BCl3 MFC set to  0.000000
5/18/2010	1:59:12 PM	SiCl4 MFC set to  0.000000
5/18/2010	1:59:12 PM	Bypass solenoid MFC set to  0.000000
5/18/2010	1:59:12 PM	Tube furnace set to 0
5/18/2010	2:00:44 PM	Helium valve closed
5/18/2010	2:00:44 PM	H2 valve closed
5/18/2010	2:00:44 PM	BCl3 valve closed
5/18/2010	2:00:44 PM	PH3 valve closed
5/18/2010	2:00:45 PM	SiCl4 pre valve closed
5/18/2010	2:00:45 PM	SiCl4 post valve closed
5/18/2010	2:00:45 PM	Bubbler valve closed
5/18/2010	2:00:45 PM	Main Vac valve opened
5/18/2010	2:00:45 PM	Bypass valve opened
5/18/2010	2:00:45 PM	Helium MFC set to  0.000000
5/18/2010	2:00:45 PM	H2 MFC set to  0.000000
5/18/2010	2:00:45 PM	BCl3 MFC set to  0.000000
5/18/2010	2:00:45 PM	SiCl4 MFC set to  0.000000
5/18/2010	2:00:45 PM	Bypass solenoid MFC set to  0.000000
5/18/2010	2:00:45 PM	Tube furnace set to 0
5/18/2010	2:00:46 PM	Run finished at 2:00 PM
5/18/2010	2:00:46 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
5/18/2010	2:01:00 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/18/2010	2:01:01 PM	Recipe started at 2:01 PM
5/18/2010	2:01:01 PM	H2 valve closed
5/18/2010	2:01:01 PM	BCl3 valve closed
5/18/2010	2:01:01 PM	PH3 valve closed
5/18/2010	2:01:01 PM	SiCl4 pre valve closed
5/18/2010	2:01:01 PM	SiCl4 post valve closed
5/18/2010	2:01:01 PM	Main Vac valve closed
5/18/2010	2:01:01 PM	Bypass valve closed
5/18/2010	2:01:01 PM	Bubbler valve closed
5/18/2010	2:01:01 PM	Helium valve opened
5/18/2010	2:01:01 PM	Helium MFC set to  500.000000
5/18/2010	2:01:01 PM	H2 MFC set to  0.000000
5/18/2010	2:01:01 PM	BCl3 MFC set to  0.000000
5/18/2010	2:01:01 PM	SiCl4 MFC set to  0.000000
5/18/2010	2:01:01 PM	Bypass solenoid MFC set to  0.000000
5/18/2010	2:01:01 PM	Tube furnace set to 0
5/18/2010	2:01:51 PM	Helium valve closed
5/18/2010	2:01:51 PM	H2 valve closed
5/18/2010	2:01:51 PM	BCl3 valve closed
5/18/2010	2:01:51 PM	PH3 valve closed
5/18/2010	2:01:51 PM	SiCl4 pre valve closed
5/18/2010	2:01:51 PM	SiCl4 post valve closed
5/18/2010	2:01:51 PM	Main Vac valve closed
5/18/2010	2:01:51 PM	Bypass valve closed
5/18/2010	2:01:51 PM	Bubbler valve closed
5/18/2010	2:01:51 PM	Helium MFC set to  0.000000
5/18/2010	2:01:51 PM	H2 MFC set to  0.000000
5/18/2010	2:01:51 PM	BCl3 MFC set to  0.000000
5/18/2010	2:01:51 PM	SiCl4 MFC set to  0.000000
5/18/2010	2:01:51 PM	Bypass solenoid MFC set to  0.000000
5/18/2010	2:01:51 PM	Tube furnace set to 0
5/18/2010	2:01:51 PM	Run finished at 2:01 PM
5/18/2010	2:01:51 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/18/2010	2:01:53 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/18/2010	2:01:53 PM	Recipe started at 2:01 PM
5/18/2010	2:01:53 PM	Helium valve closed
5/18/2010	2:01:53 PM	H2 valve closed
5/18/2010	2:01:53 PM	BCl3 valve closed
5/18/2010	2:01:53 PM	PH3 valve closed
5/18/2010	2:01:53 PM	SiCl4 pre valve closed
5/18/2010	2:01:53 PM	SiCl4 post valve closed
5/18/2010	2:01:53 PM	Main Vac valve closed
5/18/2010	2:01:53 PM	Bubbler valve closed
5/18/2010	2:01:53 PM	Bypass valve opened
5/18/2010	2:01:53 PM	Helium MFC set to  0.000000
5/18/2010	2:01:53 PM	H2 MFC set to  0.000000
5/18/2010	2:01:53 PM	BCl3 MFC set to  0.000000
5/18/2010	2:01:53 PM	SiCl4 MFC set to  0.000000
5/18/2010	2:01:53 PM	Bypass solenoid MFC set to  0.000000
5/18/2010	2:01:53 PM	Tube furnace set to 0
5/18/2010	2:02:22 PM	Helium valve closed
5/18/2010	2:02:22 PM	H2 valve closed
5/18/2010	2:02:22 PM	BCl3 valve closed
5/18/2010	2:02:22 PM	PH3 valve closed
5/18/2010	2:02:22 PM	SiCl4 pre valve closed
5/18/2010	2:02:22 PM	SiCl4 post valve closed
5/18/2010	2:02:22 PM	Bubbler valve closed
5/18/2010	2:02:22 PM	Main Vac valve opened
5/18/2010	2:02:22 PM	Bypass valve opened
5/18/2010	2:02:22 PM	Helium MFC set to  0.000000
5/18/2010	2:02:22 PM	H2 MFC set to  0.000000
5/18/2010	2:02:22 PM	BCl3 MFC set to  0.000000
5/18/2010	2:02:22 PM	SiCl4 MFC set to  0.000000
5/18/2010	2:02:22 PM	Bypass solenoid MFC set to  0.000000
5/18/2010	2:02:22 PM	Tube furnace set to 0
5/18/2010	2:02:22 PM	Run finished at 2:02 PM
5/18/2010	2:02:22 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/18/2010	2:04:32 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/18/2010	2:04:32 PM	Recipe started at 2:04 PM
5/18/2010	2:04:32 PM	H2 valve closed
5/18/2010	2:04:32 PM	BCl3 valve closed
5/18/2010	2:04:32 PM	PH3 valve closed
5/18/2010	2:04:32 PM	SiCl4 pre valve closed
5/18/2010	2:04:32 PM	SiCl4 post valve closed
5/18/2010	2:04:32 PM	Main Vac valve closed
5/18/2010	2:04:32 PM	Bypass valve closed
5/18/2010	2:04:32 PM	Bubbler valve closed
5/18/2010	2:04:32 PM	Helium valve opened
5/18/2010	2:04:32 PM	Helium MFC set to  500.000000
5/18/2010	2:04:32 PM	H2 MFC set to  0.000000
5/18/2010	2:04:32 PM	BCl3 MFC set to  0.000000
5/18/2010	2:04:32 PM	SiCl4 MFC set to  0.000000
5/18/2010	2:04:32 PM	Bypass solenoid MFC set to  0.000000
5/18/2010	2:04:32 PM	Tube furnace set to 0
5/18/2010	2:05:51 PM	Helium valve closed
5/18/2010	2:05:51 PM	H2 valve closed
5/18/2010	2:05:51 PM	BCl3 valve closed
5/18/2010	2:05:51 PM	PH3 valve closed
5/18/2010	2:05:51 PM	SiCl4 pre valve closed
5/18/2010	2:05:51 PM	SiCl4 post valve closed
5/18/2010	2:05:51 PM	Main Vac valve closed
5/18/2010	2:05:51 PM	Bypass valve closed
5/18/2010	2:05:51 PM	Bubbler valve closed
5/18/2010	2:05:51 PM	Helium MFC set to  0.000000
5/18/2010	2:05:51 PM	H2 MFC set to  0.000000
5/18/2010	2:05:51 PM	BCl3 MFC set to  0.000000
5/18/2010	2:05:51 PM	SiCl4 MFC set to  0.000000
5/18/2010	2:05:51 PM	Bypass solenoid MFC set to  0.000000
5/18/2010	2:05:51 PM	Tube furnace set to 0
5/18/2010	2:05:51 PM	Run finished at 2:05 PM
5/18/2010	2:05:51 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/18/2010	2:05:53 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/18/2010	2:05:53 PM	Recipe started at 2:05 PM
5/18/2010	2:05:53 PM	Helium valve closed
5/18/2010	2:05:53 PM	H2 valve closed
5/18/2010	2:05:53 PM	BCl3 valve closed
5/18/2010	2:05:53 PM	PH3 valve closed
5/18/2010	2:05:53 PM	SiCl4 pre valve closed
5/18/2010	2:05:53 PM	SiCl4 post valve closed
5/18/2010	2:05:53 PM	Main Vac valve closed
5/18/2010	2:05:53 PM	Bubbler valve closed
5/18/2010	2:05:53 PM	Bypass valve opened
5/18/2010	2:05:53 PM	Helium MFC set to  0.000000
5/18/2010	2:05:53 PM	H2 MFC set to  0.000000
5/18/2010	2:05:53 PM	BCl3 MFC set to  0.000000
5/18/2010	2:05:53 PM	SiCl4 MFC set to  0.000000
5/18/2010	2:05:53 PM	Bypass solenoid MFC set to  0.000000
5/18/2010	2:05:53 PM	Tube furnace set to 0
5/18/2010	2:06:25 PM	Helium valve closed
5/18/2010	2:06:25 PM	H2 valve closed
5/18/2010	2:06:25 PM	BCl3 valve closed
5/18/2010	2:06:25 PM	PH3 valve closed
5/18/2010	2:06:25 PM	SiCl4 pre valve closed
5/18/2010	2:06:25 PM	SiCl4 post valve closed
5/18/2010	2:06:25 PM	Bubbler valve closed
5/18/2010	2:06:25 PM	Main Vac valve opened
5/18/2010	2:06:25 PM	Bypass valve opened
5/18/2010	2:06:25 PM	Helium MFC set to  0.000000
5/18/2010	2:06:25 PM	H2 MFC set to  0.000000
5/18/2010	2:06:25 PM	BCl3 MFC set to  0.000000
5/18/2010	2:06:25 PM	SiCl4 MFC set to  0.000000
5/18/2010	2:06:25 PM	Bypass solenoid MFC set to  0.000000
5/18/2010	2:06:25 PM	Tube furnace set to 0
5/18/2010	2:06:26 PM	Run finished at 2:06 PM
5/18/2010	2:06:26 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/18/2010	2:07:01 PM	Bypass valve closed
5/18/2010	2:07:02 PM	Main Vac valve closed
5/18/2010	2:07:14 PM	Bypass valve opened
5/18/2010	2:07:15 PM	Main Vac valve opened
5/18/2010	2:08:34 PM	Recipe started at 2:08 PM
5/18/2010	2:08:34 PM	Helium valve closed
5/18/2010	2:08:34 PM	BCl3 valve closed
5/18/2010	2:08:34 PM	PH3 valve closed
5/18/2010	2:08:34 PM	SiCl4 pre valve closed
5/18/2010	2:08:34 PM	SiCl4 post valve closed
5/18/2010	2:08:34 PM	Main Vac valve closed
5/18/2010	2:08:34 PM	Bypass valve closed
5/18/2010	2:08:34 PM	Bubbler valve closed
5/18/2010	2:08:34 PM	H2 valve opened
5/18/2010	2:08:34 PM	Helium MFC set to  0.000000
5/18/2010	2:08:34 PM	H2 MFC set to  500.000000
5/18/2010	2:08:34 PM	BCl3 MFC set to  0.000000
5/18/2010	2:08:34 PM	SiCl4 MFC set to  0.000000
5/18/2010	2:08:34 PM	Bypass solenoid MFC set to  0.000000
5/18/2010	2:08:34 PM	Tube furnace set to 0
5/18/2010	2:09:55 PM	Helium valve closed
5/18/2010	2:09:55 PM	BCl3 valve closed
5/18/2010	2:09:55 PM	PH3 valve closed
5/18/2010	2:09:55 PM	SiCl4 pre valve closed
5/18/2010	2:09:55 PM	SiCl4 post valve closed
5/18/2010	2:09:55 PM	Main Vac valve closed
5/18/2010	2:09:55 PM	Bypass valve closed
5/18/2010	2:09:55 PM	H2 valve opened
5/18/2010	2:09:55 PM	Bubbler valve opened
5/18/2010	2:09:55 PM	Helium MFC set to  0.000000
5/18/2010	2:09:55 PM	H2 MFC set to  500.000000
5/18/2010	2:09:55 PM	BCl3 MFC set to  0.000000
5/18/2010	2:09:55 PM	SiCl4 MFC set to  0.000000
5/18/2010	2:09:55 PM	Bypass solenoid MFC set to  0.000000
5/18/2010	2:09:55 PM	Tube furnace set to 1000
5/18/2010	2:29:55 PM	Helium valve closed
5/18/2010	2:29:55 PM	PH3 valve closed
5/18/2010	2:29:55 PM	Main Vac valve closed
5/18/2010	2:29:55 PM	Bypass valve closed
5/18/2010	2:29:55 PM	H2 valve opened
5/18/2010	2:29:55 PM	BCl3 valve opened
5/18/2010	2:29:55 PM	SiCl4 pre valve opened
5/18/2010	2:29:55 PM	SiCl4 post valve opened
5/18/2010	2:29:55 PM	Bubbler valve opened
5/18/2010	2:29:55 PM	Helium MFC set to  0.000000
5/18/2010	2:29:55 PM	H2 MFC set to  500.000000
5/18/2010	2:29:55 PM	BCl3 MFC set to  35.000000
5/18/2010	2:29:55 PM	SiCl4 MFC set to  500.000000
5/18/2010	2:29:55 PM	Bypass solenoid MFC set to  0.000000
5/18/2010	2:29:56 PM	Tube furnace set to 1000
5/18/2010	2:39:56 PM	H2 valve closed
5/18/2010	2:39:56 PM	BCl3 valve closed
5/18/2010	2:39:56 PM	PH3 valve closed
5/18/2010	2:39:56 PM	SiCl4 pre valve closed
5/18/2010	2:39:56 PM	SiCl4 post valve closed
5/18/2010	2:39:56 PM	Main Vac valve closed
5/18/2010	2:39:56 PM	Bypass valve closed
5/18/2010	2:39:56 PM	Helium valve opened
5/18/2010	2:39:56 PM	Bubbler valve opened
5/18/2010	2:39:56 PM	Helium MFC set to  500.000000
5/18/2010	2:39:56 PM	H2 MFC set to  0.000000
5/18/2010	2:39:56 PM	BCl3 MFC set to  0.000000
5/18/2010	2:39:56 PM	SiCl4 MFC set to  0.000000
5/18/2010	2:39:56 PM	Bypass solenoid MFC set to  0.000000
5/18/2010	2:39:56 PM	Tube furnace set to 0
5/18/2010	2:59:56 PM	Helium valve closed
5/18/2010	2:59:56 PM	H2 valve closed
5/18/2010	2:59:56 PM	BCl3 valve closed
5/18/2010	2:59:56 PM	PH3 valve closed
5/18/2010	2:59:56 PM	SiCl4 pre valve closed
5/18/2010	2:59:56 PM	SiCl4 post valve closed
5/18/2010	2:59:56 PM	Main Vac valve closed
5/18/2010	2:59:56 PM	Bypass valve closed
5/18/2010	2:59:56 PM	Bubbler valve closed
5/18/2010	2:59:56 PM	Helium MFC set to  0.000000
5/18/2010	2:59:56 PM	H2 MFC set to  0.000000
5/18/2010	2:59:56 PM	BCl3 MFC set to  0.000000
5/18/2010	2:59:56 PM	SiCl4 MFC set to  0.000000
5/18/2010	2:59:56 PM	Bypass solenoid MFC set to  0.000000
5/18/2010	2:59:56 PM	Tube furnace set to 0
5/18/2010	2:59:56 PM	Run finished at 2:59 PM
5/18/2010	3:02:13 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/18/2010	3:02:14 PM	Recipe started at 3:02 PM
5/18/2010	3:02:14 PM	Helium valve closed
5/18/2010	3:02:14 PM	H2 valve closed
5/18/2010	3:02:14 PM	BCl3 valve closed
5/18/2010	3:02:14 PM	PH3 valve closed
5/18/2010	3:02:14 PM	SiCl4 pre valve closed
5/18/2010	3:02:14 PM	SiCl4 post valve closed
5/18/2010	3:02:14 PM	Main Vac valve closed
5/18/2010	3:02:14 PM	Bubbler valve closed
5/18/2010	3:02:14 PM	Bypass valve opened
5/18/2010	3:02:14 PM	Helium MFC set to  0.000000
5/18/2010	3:02:14 PM	H2 MFC set to  0.000000
5/18/2010	3:02:14 PM	BCl3 MFC set to  0.000000
5/18/2010	3:02:14 PM	SiCl4 MFC set to  0.000000
5/18/2010	3:02:14 PM	Bypass solenoid MFC set to  0.000000
5/18/2010	3:02:14 PM	Tube furnace set to 0
5/18/2010	3:02:59 PM	Helium valve closed
5/18/2010	3:02:59 PM	H2 valve closed
5/18/2010	3:02:59 PM	BCl3 valve closed
5/18/2010	3:02:59 PM	PH3 valve closed
5/18/2010	3:02:59 PM	SiCl4 pre valve closed
5/18/2010	3:02:59 PM	SiCl4 post valve closed
5/18/2010	3:02:59 PM	Bubbler valve closed
5/18/2010	3:02:59 PM	Main Vac valve opened
5/18/2010	3:02:59 PM	Bypass valve opened
5/18/2010	3:02:59 PM	Helium MFC set to  0.000000
5/18/2010	3:02:59 PM	H2 MFC set to  0.000000
5/18/2010	3:02:59 PM	BCl3 MFC set to  0.000000
5/18/2010	3:02:59 PM	SiCl4 MFC set to  0.000000
5/18/2010	3:02:59 PM	Bypass solenoid MFC set to  0.000000
5/18/2010	3:02:59 PM	Tube furnace set to 0
5/18/2010	3:03:00 PM	Run finished at 3:03 PM
5/18/2010	3:03:00 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/18/2010	3:03:21 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
5/18/2010	3:03:27 PM	Recipe started at 3:03 PM
5/18/2010	3:03:27 PM	H2 valve closed
5/18/2010	3:03:27 PM	BCl3 valve closed
5/18/2010	3:03:27 PM	PH3 valve closed
5/18/2010	3:03:27 PM	SiCl4 pre valve closed
5/18/2010	3:03:27 PM	SiCl4 post valve closed
5/18/2010	3:03:27 PM	Main Vac valve closed
5/18/2010	3:03:27 PM	Bypass valve closed
5/18/2010	3:03:27 PM	Bubbler valve closed
5/18/2010	3:03:27 PM	Helium valve opened
5/18/2010	3:03:27 PM	Helium MFC set to  500.000000
5/18/2010	3:03:27 PM	H2 MFC set to  0.000000
5/18/2010	3:03:27 PM	BCl3 MFC set to  0.000000
5/18/2010	3:03:27 PM	SiCl4 MFC set to  0.000000
5/18/2010	3:03:27 PM	Bypass solenoid MFC set to  0.000000
5/18/2010	3:03:27 PM	Tube furnace set to 0
5/18/2010	3:04:48 PM	Helium valve closed
5/18/2010	3:04:48 PM	H2 valve closed
5/18/2010	3:04:48 PM	BCl3 valve closed
5/18/2010	3:04:48 PM	PH3 valve closed
5/18/2010	3:04:48 PM	SiCl4 pre valve closed
5/18/2010	3:04:48 PM	SiCl4 post valve closed
5/18/2010	3:04:48 PM	Main Vac valve closed
5/18/2010	3:04:48 PM	Bypass valve closed
5/18/2010	3:04:48 PM	Bubbler valve closed
5/18/2010	3:04:48 PM	Helium MFC set to  0.000000
5/18/2010	3:04:48 PM	H2 MFC set to  0.000000
5/18/2010	3:04:48 PM	BCl3 MFC set to  0.000000
5/18/2010	3:04:48 PM	SiCl4 MFC set to  0.000000
5/18/2010	3:04:48 PM	Bypass solenoid MFC set to  0.000000
5/18/2010	3:04:48 PM	Tube furnace set to 0
5/18/2010	3:05:03 PM	Helium valve closed
5/18/2010	3:05:03 PM	H2 valve closed
5/18/2010	3:05:03 PM	BCl3 valve closed
5/18/2010	3:05:03 PM	PH3 valve closed
5/18/2010	3:05:03 PM	SiCl4 pre valve closed
5/18/2010	3:05:03 PM	SiCl4 post valve closed
5/18/2010	3:05:03 PM	Main Vac valve closed
5/18/2010	3:05:03 PM	Bubbler valve closed
5/18/2010	3:05:03 PM	Bypass valve opened
5/18/2010	3:05:03 PM	Helium MFC set to  0.000000
5/18/2010	3:05:03 PM	H2 MFC set to  0.000000
5/18/2010	3:05:03 PM	BCl3 MFC set to  0.000000
5/18/2010	3:05:03 PM	SiCl4 MFC set to  0.000000
5/18/2010	3:05:03 PM	Bypass solenoid MFC set to  0.000000
5/18/2010	3:05:03 PM	Tube furnace set to 0
5/18/2010	3:05:35 PM	Helium valve closed
5/18/2010	3:05:35 PM	H2 valve closed
5/18/2010	3:05:35 PM	BCl3 valve closed
5/18/2010	3:05:35 PM	PH3 valve closed
5/18/2010	3:05:35 PM	SiCl4 pre valve closed
5/18/2010	3:05:35 PM	SiCl4 post valve closed
5/18/2010	3:05:35 PM	Bubbler valve closed
5/18/2010	3:05:35 PM	Main Vac valve opened
5/18/2010	3:05:35 PM	Bypass valve opened
5/18/2010	3:05:35 PM	Helium MFC set to  0.000000
5/18/2010	3:05:35 PM	H2 MFC set to  0.000000
5/18/2010	3:05:35 PM	BCl3 MFC set to  0.000000
5/18/2010	3:05:35 PM	SiCl4 MFC set to  0.000000
5/18/2010	3:05:35 PM	Bypass solenoid MFC set to  0.000000
5/18/2010	3:05:35 PM	Tube furnace set to 0
5/18/2010	3:10:35 PM	H2 valve closed
5/18/2010	3:10:35 PM	BCl3 valve closed
5/18/2010	3:10:35 PM	PH3 valve closed
5/18/2010	3:10:35 PM	SiCl4 pre valve closed
5/18/2010	3:10:35 PM	SiCl4 post valve closed
5/18/2010	3:10:35 PM	Main Vac valve closed
5/18/2010	3:10:35 PM	Bypass valve closed
5/18/2010	3:10:35 PM	Bubbler valve closed
5/18/2010	3:10:35 PM	Helium valve opened
5/18/2010	3:10:35 PM	Helium MFC set to  500.000000
5/18/2010	3:10:35 PM	H2 MFC set to  0.000000
5/18/2010	3:10:35 PM	BCl3 MFC set to  0.000000
5/18/2010	3:10:36 PM	SiCl4 MFC set to  0.000000
5/18/2010	3:10:36 PM	Bypass solenoid MFC set to  0.000000
5/18/2010	3:10:36 PM	Tube furnace set to 0
5/18/2010	3:11:57 PM	Helium valve closed
5/18/2010	3:11:57 PM	H2 valve closed
5/18/2010	3:11:57 PM	BCl3 valve closed
5/18/2010	3:11:57 PM	PH3 valve closed
5/18/2010	3:11:57 PM	SiCl4 pre valve closed
5/18/2010	3:11:57 PM	SiCl4 post valve closed
5/18/2010	3:11:57 PM	Main Vac valve closed
5/18/2010	3:11:57 PM	Bypass valve closed
5/18/2010	3:11:57 PM	Bubbler valve closed
5/18/2010	3:11:57 PM	Helium MFC set to  0.000000
5/18/2010	3:11:57 PM	H2 MFC set to  0.000000
5/18/2010	3:11:57 PM	BCl3 MFC set to  0.000000
5/18/2010	3:11:57 PM	SiCl4 MFC set to  0.000000
5/18/2010	3:11:57 PM	Bypass solenoid MFC set to  0.000000
5/18/2010	3:11:57 PM	Tube furnace set to 0
5/18/2010	3:12:12 PM	Helium valve closed
5/18/2010	3:12:12 PM	H2 valve closed
5/18/2010	3:12:12 PM	BCl3 valve closed
5/18/2010	3:12:12 PM	PH3 valve closed
5/18/2010	3:12:12 PM	SiCl4 pre valve closed
5/18/2010	3:12:12 PM	SiCl4 post valve closed
5/18/2010	3:12:12 PM	Main Vac valve closed
5/18/2010	3:12:12 PM	Bubbler valve closed
5/18/2010	3:12:12 PM	Bypass valve opened
5/18/2010	3:12:12 PM	Helium MFC set to  0.000000
5/18/2010	3:12:12 PM	H2 MFC set to  0.000000
5/18/2010	3:12:12 PM	BCl3 MFC set to  0.000000
5/18/2010	3:12:12 PM	SiCl4 MFC set to  0.000000
5/18/2010	3:12:12 PM	Bypass solenoid MFC set to  0.000000
5/18/2010	3:12:12 PM	Tube furnace set to 0
5/18/2010	3:12:44 PM	Helium valve closed
5/18/2010	3:12:44 PM	H2 valve closed
5/18/2010	3:12:44 PM	BCl3 valve closed
5/18/2010	3:12:44 PM	PH3 valve closed
5/18/2010	3:12:44 PM	SiCl4 pre valve closed
5/18/2010	3:12:44 PM	SiCl4 post valve closed
5/18/2010	3:12:44 PM	Bubbler valve closed
5/18/2010	3:12:44 PM	Main Vac valve opened
5/18/2010	3:12:44 PM	Bypass valve opened
5/18/2010	3:12:44 PM	Helium MFC set to  0.000000
5/18/2010	3:12:44 PM	H2 MFC set to  0.000000
5/18/2010	3:12:44 PM	BCl3 MFC set to  0.000000
5/18/2010	3:12:44 PM	SiCl4 MFC set to  0.000000
5/18/2010	3:12:44 PM	Bypass solenoid MFC set to  0.000000
5/18/2010	3:12:45 PM	Tube furnace set to 0
5/18/2010	3:13:32 PM	H2 valve closed
5/18/2010	3:13:32 PM	BCl3 valve closed
5/18/2010	3:13:32 PM	PH3 valve closed
5/18/2010	3:13:32 PM	SiCl4 pre valve closed
5/18/2010	3:13:32 PM	SiCl4 post valve closed
5/18/2010	3:13:32 PM	Main Vac valve closed
5/18/2010	3:13:32 PM	Bypass valve closed
5/18/2010	3:13:32 PM	Bubbler valve closed
5/18/2010	3:13:32 PM	Helium valve opened
5/18/2010	3:13:32 PM	Helium MFC set to  500.000000
5/18/2010	3:13:32 PM	H2 MFC set to  0.000000
5/18/2010	3:13:32 PM	BCl3 MFC set to  0.000000
5/18/2010	3:13:32 PM	SiCl4 MFC set to  0.000000
5/18/2010	3:13:32 PM	Bypass solenoid MFC set to  0.000000
5/18/2010	3:13:32 PM	Tube furnace set to 0
5/18/2010	3:14:54 PM	Helium valve closed
5/18/2010	3:14:54 PM	H2 valve closed
5/18/2010	3:14:54 PM	BCl3 valve closed
5/18/2010	3:14:54 PM	PH3 valve closed
5/18/2010	3:14:54 PM	SiCl4 pre valve closed
5/18/2010	3:14:54 PM	SiCl4 post valve closed
5/18/2010	3:14:54 PM	Main Vac valve closed
5/18/2010	3:14:54 PM	Bypass valve closed
5/18/2010	3:14:54 PM	Bubbler valve closed
5/18/2010	3:14:54 PM	Helium MFC set to  0.000000
5/18/2010	3:14:54 PM	H2 MFC set to  0.000000
5/18/2010	3:14:54 PM	BCl3 MFC set to  0.000000
5/18/2010	3:14:54 PM	SiCl4 MFC set to  0.000000
5/18/2010	3:14:54 PM	Bypass solenoid MFC set to  0.000000
5/18/2010	3:14:54 PM	Tube furnace set to 0
5/18/2010	3:15:09 PM	Helium valve closed
5/18/2010	3:15:09 PM	H2 valve closed
5/18/2010	3:15:09 PM	BCl3 valve closed
5/18/2010	3:15:09 PM	PH3 valve closed
5/18/2010	3:15:09 PM	SiCl4 pre valve closed
5/18/2010	3:15:09 PM	SiCl4 post valve closed
5/18/2010	3:15:09 PM	Main Vac valve closed
5/18/2010	3:15:09 PM	Bubbler valve closed
5/18/2010	3:15:09 PM	Bypass valve opened
5/18/2010	3:15:09 PM	Helium MFC set to  0.000000
5/18/2010	3:15:09 PM	H2 MFC set to  0.000000
5/18/2010	3:15:09 PM	BCl3 MFC set to  0.000000
5/18/2010	3:15:09 PM	SiCl4 MFC set to  0.000000
5/18/2010	3:15:09 PM	Bypass solenoid MFC set to  0.000000
5/18/2010	3:15:09 PM	Tube furnace set to 0
5/18/2010	3:15:42 PM	Helium valve closed
5/18/2010	3:15:42 PM	H2 valve closed
5/18/2010	3:15:42 PM	BCl3 valve closed
5/18/2010	3:15:42 PM	PH3 valve closed
5/18/2010	3:15:42 PM	SiCl4 pre valve closed
5/18/2010	3:15:42 PM	SiCl4 post valve closed
5/18/2010	3:15:42 PM	Bubbler valve closed
5/18/2010	3:15:42 PM	Main Vac valve opened
5/18/2010	3:15:42 PM	Bypass valve opened
5/18/2010	3:15:42 PM	Helium MFC set to  0.000000
5/18/2010	3:15:42 PM	H2 MFC set to  0.000000
5/18/2010	3:15:42 PM	BCl3 MFC set to  0.000000
5/18/2010	3:15:42 PM	SiCl4 MFC set to  0.000000
5/18/2010	3:15:42 PM	Bypass solenoid MFC set to  0.000000
5/18/2010	3:15:42 PM	Tube furnace set to 0
5/18/2010	3:15:47 PM	Helium valve closed
5/18/2010	3:15:47 PM	H2 valve closed
5/18/2010	3:15:47 PM	BCl3 valve closed
5/18/2010	3:15:47 PM	PH3 valve closed
5/18/2010	3:15:47 PM	SiCl4 pre valve closed
5/18/2010	3:15:47 PM	SiCl4 post valve closed
5/18/2010	3:15:47 PM	Bubbler valve closed
5/18/2010	3:15:47 PM	Main Vac valve opened
5/18/2010	3:15:47 PM	Bypass valve opened
5/18/2010	3:15:47 PM	Helium MFC set to  0.000000
5/18/2010	3:15:47 PM	H2 MFC set to  0.000000
5/18/2010	3:15:47 PM	BCl3 MFC set to  0.000000
5/18/2010	3:15:47 PM	SiCl4 MFC set to  0.000000
5/18/2010	3:15:47 PM	Bypass solenoid MFC set to  0.000000
5/18/2010	3:15:47 PM	Tube furnace set to 0
5/18/2010	3:15:48 PM	Run finished at 3:15 PM
5/18/2010	3:15:48 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
5/18/2010	3:16:49 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/18/2010	3:16:50 PM	Recipe started at 3:16 PM
5/18/2010	3:16:50 PM	H2 valve closed
5/18/2010	3:16:50 PM	BCl3 valve closed
5/18/2010	3:16:50 PM	PH3 valve closed
5/18/2010	3:16:50 PM	SiCl4 pre valve closed
5/18/2010	3:16:50 PM	SiCl4 post valve closed
5/18/2010	3:16:50 PM	Main Vac valve closed
5/18/2010	3:16:50 PM	Bypass valve closed
5/18/2010	3:16:50 PM	Bubbler valve closed
5/18/2010	3:16:50 PM	Helium valve opened
5/18/2010	3:16:50 PM	Helium MFC set to  500.000000
5/18/2010	3:16:50 PM	H2 MFC set to  0.000000
5/18/2010	3:16:50 PM	BCl3 MFC set to  0.000000
5/18/2010	3:16:50 PM	SiCl4 MFC set to  0.000000
5/18/2010	3:16:50 PM	Bypass solenoid MFC set to  0.000000
5/18/2010	3:16:50 PM	Tube furnace set to 0
5/18/2010	3:17:25 PM	Helium valve closed
5/18/2010	3:17:25 PM	H2 valve closed
5/18/2010	3:17:25 PM	BCl3 valve closed
5/18/2010	3:17:25 PM	PH3 valve closed
5/18/2010	3:17:25 PM	SiCl4 pre valve closed
5/18/2010	3:17:25 PM	SiCl4 post valve closed
5/18/2010	3:17:25 PM	Main Vac valve closed
5/18/2010	3:17:25 PM	Bypass valve closed
5/18/2010	3:17:25 PM	Bubbler valve closed
5/18/2010	3:17:25 PM	Helium MFC set to  0.000000
5/18/2010	3:17:25 PM	H2 MFC set to  0.000000
5/18/2010	3:17:25 PM	BCl3 MFC set to  0.000000
5/18/2010	3:17:25 PM	SiCl4 MFC set to  0.000000
5/18/2010	3:17:25 PM	Bypass solenoid MFC set to  0.000000
5/18/2010	3:17:25 PM	Tube furnace set to 0
5/18/2010	3:17:25 PM	Run finished at 3:17 PM
5/18/2010	3:17:25 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/18/2010	3:17:26 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/18/2010	3:17:26 PM	Recipe started at 3:17 PM
5/18/2010	3:17:26 PM	Helium valve closed
5/18/2010	3:17:26 PM	H2 valve closed
5/18/2010	3:17:26 PM	BCl3 valve closed
5/18/2010	3:17:26 PM	PH3 valve closed
5/18/2010	3:17:26 PM	SiCl4 pre valve closed
5/18/2010	3:17:26 PM	SiCl4 post valve closed
5/18/2010	3:17:26 PM	Main Vac valve closed
5/18/2010	3:17:26 PM	Bubbler valve closed
5/18/2010	3:17:26 PM	Bypass valve opened
5/18/2010	3:17:26 PM	Helium MFC set to  0.000000
5/18/2010	3:17:26 PM	H2 MFC set to  0.000000
5/18/2010	3:17:26 PM	BCl3 MFC set to  0.000000
5/18/2010	3:17:26 PM	SiCl4 MFC set to  0.000000
5/18/2010	3:17:26 PM	Bypass solenoid MFC set to  0.000000
5/18/2010	3:17:27 PM	Tube furnace set to 0
5/18/2010	3:17:52 PM	Helium valve closed
5/18/2010	3:17:52 PM	H2 valve closed
5/18/2010	3:17:52 PM	BCl3 valve closed
5/18/2010	3:17:52 PM	PH3 valve closed
5/18/2010	3:17:52 PM	SiCl4 pre valve closed
5/18/2010	3:17:52 PM	SiCl4 post valve closed
5/18/2010	3:17:52 PM	Bubbler valve closed
5/18/2010	3:17:52 PM	Main Vac valve opened
5/18/2010	3:17:52 PM	Bypass valve opened
5/18/2010	3:17:52 PM	Helium MFC set to  0.000000
5/18/2010	3:17:52 PM	H2 MFC set to  0.000000
5/18/2010	3:17:52 PM	BCl3 MFC set to  0.000000
5/18/2010	3:17:52 PM	SiCl4 MFC set to  0.000000
5/18/2010	3:17:52 PM	Bypass solenoid MFC set to  0.000000
5/18/2010	3:17:52 PM	Tube furnace set to 0
5/18/2010	3:17:52 PM	Run finished at 3:17 PM
5/18/2010	3:17:52 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/18/2010	3:18:27 PM	Bypass valve closed
5/18/2010	3:18:27 PM	Main Vac valve closed
5/18/2010	3:18:41 PM	Bypass valve opened
5/18/2010	3:18:41 PM	Main Vac valve opened
5/18/2010	3:19:12 PM	Recipe started at 3:19 PM
5/18/2010	3:19:12 PM	Helium valve closed
5/18/2010	3:19:12 PM	BCl3 valve closed
5/18/2010	3:19:12 PM	PH3 valve closed
5/18/2010	3:19:12 PM	SiCl4 pre valve closed
5/18/2010	3:19:12 PM	SiCl4 post valve closed
5/18/2010	3:19:12 PM	Main Vac valve closed
5/18/2010	3:19:12 PM	Bypass valve closed
5/18/2010	3:19:12 PM	Bubbler valve closed
5/18/2010	3:19:12 PM	H2 valve opened
5/18/2010	3:19:12 PM	Helium MFC set to  0.000000
5/18/2010	3:19:12 PM	H2 MFC set to  500.000000
5/18/2010	3:19:12 PM	BCl3 MFC set to  0.000000
5/18/2010	3:19:12 PM	SiCl4 MFC set to  0.000000
5/18/2010	3:19:12 PM	Bypass solenoid MFC set to  0.000000
5/18/2010	3:19:12 PM	Tube furnace set to 0
5/18/2010	3:20:33 PM	Helium valve closed
5/18/2010	3:20:33 PM	BCl3 valve closed
5/18/2010	3:20:33 PM	PH3 valve closed
5/18/2010	3:20:33 PM	SiCl4 pre valve closed
5/18/2010	3:20:33 PM	SiCl4 post valve closed
5/18/2010	3:20:33 PM	Main Vac valve closed
5/18/2010	3:20:33 PM	Bypass valve closed
5/18/2010	3:20:33 PM	H2 valve opened
5/18/2010	3:20:33 PM	Bubbler valve opened
5/18/2010	3:20:33 PM	Helium MFC set to  0.000000
5/18/2010	3:20:33 PM	H2 MFC set to  500.000000
5/18/2010	3:20:33 PM	BCl3 MFC set to  0.000000
5/18/2010	3:20:33 PM	SiCl4 MFC set to  0.000000
5/18/2010	3:20:33 PM	Bypass solenoid MFC set to  0.000000
5/18/2010	3:20:33 PM	Tube furnace set to 1000
5/18/2010	3:40:33 PM	Helium valve closed
5/18/2010	3:40:33 PM	PH3 valve closed
5/18/2010	3:40:33 PM	Main Vac valve closed
5/18/2010	3:40:33 PM	Bypass valve closed
5/18/2010	3:40:33 PM	H2 valve opened
5/18/2010	3:40:33 PM	BCl3 valve opened
5/18/2010	3:40:33 PM	SiCl4 pre valve opened
5/18/2010	3:40:33 PM	SiCl4 post valve opened
5/18/2010	3:40:33 PM	Bubbler valve opened
5/18/2010	3:40:33 PM	Helium MFC set to  0.000000
5/18/2010	3:40:33 PM	H2 MFC set to  500.000000
5/18/2010	3:40:33 PM	BCl3 MFC set to  35.000000
5/18/2010	3:40:33 PM	SiCl4 MFC set to  450.000000
5/18/2010	3:40:33 PM	Bypass solenoid MFC set to  0.000000
5/18/2010	3:40:33 PM	Tube furnace set to 1000
5/18/2010	3:50:33 PM	H2 valve closed
5/18/2010	3:50:33 PM	BCl3 valve closed
5/18/2010	3:50:33 PM	PH3 valve closed
5/18/2010	3:50:33 PM	SiCl4 pre valve closed
5/18/2010	3:50:33 PM	SiCl4 post valve closed
5/18/2010	3:50:33 PM	Main Vac valve closed
5/18/2010	3:50:33 PM	Bypass valve closed
5/18/2010	3:50:33 PM	Helium valve opened
5/18/2010	3:50:33 PM	Bubbler valve opened
5/18/2010	3:50:33 PM	Helium MFC set to  500.000000
5/18/2010	3:50:33 PM	H2 MFC set to  0.000000
5/18/2010	3:50:33 PM	BCl3 MFC set to  0.000000
5/18/2010	3:50:33 PM	SiCl4 MFC set to  0.000000
5/18/2010	3:50:33 PM	Bypass solenoid MFC set to  0.000000
5/18/2010	3:50:34 PM	Tube furnace set to 0
5/18/2010	4:10:34 PM	Helium valve closed
5/18/2010	4:10:34 PM	H2 valve closed
5/18/2010	4:10:34 PM	BCl3 valve closed
5/18/2010	4:10:34 PM	PH3 valve closed
5/18/2010	4:10:34 PM	SiCl4 pre valve closed
5/18/2010	4:10:34 PM	SiCl4 post valve closed
5/18/2010	4:10:34 PM	Main Vac valve closed
5/18/2010	4:10:34 PM	Bypass valve closed
5/18/2010	4:10:34 PM	Bubbler valve closed
5/18/2010	4:10:34 PM	Helium MFC set to  0.000000
5/18/2010	4:10:34 PM	H2 MFC set to  0.000000
5/18/2010	4:10:34 PM	BCl3 MFC set to  0.000000
5/18/2010	4:10:34 PM	SiCl4 MFC set to  0.000000
5/18/2010	4:10:34 PM	Bypass solenoid MFC set to  0.000000
5/18/2010	4:10:34 PM	Tube furnace set to 0
5/18/2010	4:10:34 PM	Run finished at 4:10 PM
5/18/2010	4:14:43 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/18/2010	4:14:44 PM	Recipe started at 4:14 PM
5/18/2010	4:14:44 PM	Helium valve closed
5/18/2010	4:14:44 PM	H2 valve closed
5/18/2010	4:14:44 PM	BCl3 valve closed
5/18/2010	4:14:44 PM	PH3 valve closed
5/18/2010	4:14:44 PM	SiCl4 pre valve closed
5/18/2010	4:14:44 PM	SiCl4 post valve closed
5/18/2010	4:14:44 PM	Main Vac valve closed
5/18/2010	4:14:44 PM	Bubbler valve closed
5/18/2010	4:14:44 PM	Bypass valve opened
5/18/2010	4:14:44 PM	Helium MFC set to  0.000000
5/18/2010	4:14:44 PM	H2 MFC set to  0.000000
5/18/2010	4:14:44 PM	BCl3 MFC set to  0.000000
5/18/2010	4:14:44 PM	SiCl4 MFC set to  0.000000
5/18/2010	4:14:44 PM	Bypass solenoid MFC set to  0.000000
5/18/2010	4:14:44 PM	Tube furnace set to 0
5/18/2010	4:15:30 PM	Helium valve closed
5/18/2010	4:15:30 PM	H2 valve closed
5/18/2010	4:15:30 PM	BCl3 valve closed
5/18/2010	4:15:30 PM	PH3 valve closed
5/18/2010	4:15:30 PM	SiCl4 pre valve closed
5/18/2010	4:15:30 PM	SiCl4 post valve closed
5/18/2010	4:15:30 PM	Bubbler valve closed
5/18/2010	4:15:30 PM	Main Vac valve opened
5/18/2010	4:15:30 PM	Bypass valve opened
5/18/2010	4:15:30 PM	Helium MFC set to  0.000000
5/18/2010	4:15:30 PM	H2 MFC set to  0.000000
5/18/2010	4:15:30 PM	BCl3 MFC set to  0.000000
5/18/2010	4:15:30 PM	SiCl4 MFC set to  0.000000
5/18/2010	4:15:30 PM	Bypass solenoid MFC set to  0.000000
5/18/2010	4:15:30 PM	Tube furnace set to 0
5/18/2010	4:15:30 PM	Run finished at 4:15 PM
5/18/2010	4:15:30 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/18/2010	4:24:31 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/18/2010	4:24:31 PM	Recipe started at 4:24 PM
5/18/2010	4:24:31 PM	H2 valve closed
5/18/2010	4:24:31 PM	BCl3 valve closed
5/18/2010	4:24:31 PM	PH3 valve closed
5/18/2010	4:24:31 PM	SiCl4 pre valve closed
5/18/2010	4:24:31 PM	SiCl4 post valve closed
5/18/2010	4:24:31 PM	Main Vac valve closed
5/18/2010	4:24:31 PM	Bypass valve closed
5/18/2010	4:24:31 PM	Bubbler valve closed
5/18/2010	4:24:31 PM	Helium valve opened
5/18/2010	4:24:31 PM	Helium MFC set to  500.000000
5/18/2010	4:24:31 PM	H2 MFC set to  0.000000
5/18/2010	4:24:31 PM	BCl3 MFC set to  0.000000
5/18/2010	4:24:31 PM	SiCl4 MFC set to  0.000000
5/18/2010	4:24:31 PM	Bypass solenoid MFC set to  0.000000
5/18/2010	4:24:31 PM	Tube furnace set to 0
5/18/2010	4:25:50 PM	Helium valve closed
5/18/2010	4:25:50 PM	H2 valve closed
5/18/2010	4:25:50 PM	BCl3 valve closed
5/18/2010	4:25:50 PM	PH3 valve closed
5/18/2010	4:25:50 PM	SiCl4 pre valve closed
5/18/2010	4:25:50 PM	SiCl4 post valve closed
5/18/2010	4:25:50 PM	Main Vac valve closed
5/18/2010	4:25:50 PM	Bypass valve closed
5/18/2010	4:25:50 PM	Bubbler valve closed
5/18/2010	4:25:50 PM	Helium MFC set to  0.000000
5/18/2010	4:25:50 PM	H2 MFC set to  0.000000
5/18/2010	4:25:50 PM	BCl3 MFC set to  0.000000
5/18/2010	4:25:50 PM	SiCl4 MFC set to  0.000000
5/18/2010	4:25:50 PM	Bypass solenoid MFC set to  0.000000
5/18/2010	4:25:50 PM	Tube furnace set to 0
5/18/2010	4:25:50 PM	Run finished at 4:25 PM
5/18/2010	4:25:50 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/18/2010	4:26:01 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/18/2010	4:26:02 PM	Recipe started at 4:26 PM
5/18/2010	4:26:02 PM	Helium valve closed
5/18/2010	4:26:02 PM	H2 valve closed
5/18/2010	4:26:02 PM	BCl3 valve closed
5/18/2010	4:26:02 PM	PH3 valve closed
5/18/2010	4:26:02 PM	SiCl4 pre valve closed
5/18/2010	4:26:02 PM	SiCl4 post valve closed
5/18/2010	4:26:02 PM	Main Vac valve closed
5/18/2010	4:26:02 PM	Bubbler valve closed
5/18/2010	4:26:02 PM	Bypass valve opened
5/18/2010	4:26:02 PM	Helium MFC set to  0.000000
5/18/2010	4:26:02 PM	H2 MFC set to  0.000000
5/18/2010	4:26:02 PM	BCl3 MFC set to  0.000000
5/18/2010	4:26:02 PM	SiCl4 MFC set to  0.000000
5/18/2010	4:26:02 PM	Bypass solenoid MFC set to  0.000000
5/18/2010	4:26:02 PM	Tube furnace set to 0
5/18/2010	4:26:34 PM	Helium valve closed
5/18/2010	4:26:34 PM	H2 valve closed
5/18/2010	4:26:34 PM	BCl3 valve closed
5/18/2010	4:26:34 PM	PH3 valve closed
5/18/2010	4:26:34 PM	SiCl4 pre valve closed
5/18/2010	4:26:34 PM	SiCl4 post valve closed
5/18/2010	4:26:34 PM	Bubbler valve closed
5/18/2010	4:26:34 PM	Main Vac valve opened
5/18/2010	4:26:34 PM	Bypass valve opened
5/18/2010	4:26:34 PM	Helium MFC set to  0.000000
5/18/2010	4:26:34 PM	H2 MFC set to  0.000000
5/18/2010	4:26:34 PM	BCl3 MFC set to  0.000000
5/18/2010	4:26:34 PM	SiCl4 MFC set to  0.000000
5/18/2010	4:26:34 PM	Bypass solenoid MFC set to  0.000000
5/18/2010	4:26:34 PM	Tube furnace set to 0
5/18/2010	4:26:34 PM	Run finished at 4:26 PM
5/18/2010	4:26:34 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/18/2010	4:26:39 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/18/2010	4:26:40 PM	Recipe started at 4:26 PM
5/18/2010	4:26:40 PM	H2 valve closed
5/18/2010	4:26:40 PM	BCl3 valve closed
5/18/2010	4:26:40 PM	PH3 valve closed
5/18/2010	4:26:40 PM	SiCl4 pre valve closed
5/18/2010	4:26:40 PM	SiCl4 post valve closed
5/18/2010	4:26:40 PM	Main Vac valve closed
5/18/2010	4:26:40 PM	Bypass valve closed
5/18/2010	4:26:40 PM	Bubbler valve closed
5/18/2010	4:26:40 PM	Helium valve opened
5/18/2010	4:26:40 PM	Helium MFC set to  500.000000
5/18/2010	4:26:40 PM	H2 MFC set to  0.000000
5/18/2010	4:26:40 PM	BCl3 MFC set to  0.000000
5/18/2010	4:26:40 PM	SiCl4 MFC set to  0.000000
5/18/2010	4:26:40 PM	Bypass solenoid MFC set to  0.000000
5/18/2010	4:26:40 PM	Tube furnace set to 0
5/18/2010	4:27:07 PM	Helium valve closed
5/18/2010	4:27:07 PM	H2 valve closed
5/18/2010	4:27:07 PM	BCl3 valve closed
5/18/2010	4:27:07 PM	PH3 valve closed
5/18/2010	4:27:07 PM	SiCl4 pre valve closed
5/18/2010	4:27:07 PM	SiCl4 post valve closed
5/18/2010	4:27:07 PM	Main Vac valve closed
5/18/2010	4:27:07 PM	Bypass valve closed
5/18/2010	4:27:07 PM	Bubbler valve closed
5/18/2010	4:27:07 PM	Helium MFC set to  0.000000
5/18/2010	4:27:07 PM	H2 MFC set to  0.000000
5/18/2010	4:27:07 PM	BCl3 MFC set to  0.000000
5/18/2010	4:27:07 PM	SiCl4 MFC set to  0.000000
5/18/2010	4:27:07 PM	Bypass solenoid MFC set to  0.000000
5/18/2010	4:27:07 PM	Tube furnace set to 0
5/18/2010	4:27:07 PM	Run finished at 4:27 PM
5/18/2010	4:27:07 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/18/2010	4:27:08 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/18/2010	4:27:09 PM	Recipe started at 4:27 PM
5/18/2010	4:27:09 PM	Helium valve closed
5/18/2010	4:27:09 PM	H2 valve closed
5/18/2010	4:27:09 PM	BCl3 valve closed
5/18/2010	4:27:09 PM	PH3 valve closed
5/18/2010	4:27:09 PM	SiCl4 pre valve closed
5/18/2010	4:27:09 PM	SiCl4 post valve closed
5/18/2010	4:27:09 PM	Main Vac valve closed
5/18/2010	4:27:09 PM	Bubbler valve closed
5/18/2010	4:27:09 PM	Bypass valve opened
5/18/2010	4:27:09 PM	Helium MFC set to  0.000000
5/18/2010	4:27:09 PM	H2 MFC set to  0.000000
5/18/2010	4:27:09 PM	BCl3 MFC set to  0.000000
5/18/2010	4:27:09 PM	SiCl4 MFC set to  0.000000
5/18/2010	4:27:09 PM	Bypass solenoid MFC set to  0.000000
5/18/2010	4:27:09 PM	Tube furnace set to 0
5/18/2010	4:27:32 PM	Helium valve closed
5/18/2010	4:27:32 PM	H2 valve closed
5/18/2010	4:27:32 PM	BCl3 valve closed
5/18/2010	4:27:32 PM	PH3 valve closed
5/18/2010	4:27:32 PM	SiCl4 pre valve closed
5/18/2010	4:27:32 PM	SiCl4 post valve closed
5/18/2010	4:27:32 PM	Bubbler valve closed
5/18/2010	4:27:32 PM	Main Vac valve opened
5/18/2010	4:27:32 PM	Bypass valve opened
5/18/2010	4:27:32 PM	Helium MFC set to  0.000000
5/18/2010	4:27:32 PM	H2 MFC set to  0.000000
5/18/2010	4:27:32 PM	BCl3 MFC set to  0.000000
5/18/2010	4:27:32 PM	SiCl4 MFC set to  0.000000
5/18/2010	4:27:32 PM	Bypass solenoid MFC set to  0.000000
5/18/2010	4:27:32 PM	Tube furnace set to 0
5/18/2010	4:27:33 PM	Run finished at 4:27 PM
5/18/2010	4:27:33 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/18/2010	4:28:12 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/18/2010	4:28:12 PM	Recipe started at 4:28 PM
5/18/2010	4:28:12 PM	H2 valve closed
5/18/2010	4:28:12 PM	BCl3 valve closed
5/18/2010	4:28:12 PM	PH3 valve closed
5/18/2010	4:28:12 PM	SiCl4 pre valve closed
5/18/2010	4:28:12 PM	SiCl4 post valve closed
5/18/2010	4:28:12 PM	Main Vac valve closed
5/18/2010	4:28:12 PM	Bypass valve closed
5/18/2010	4:28:12 PM	Bubbler valve closed
5/18/2010	4:28:12 PM	Helium valve opened
5/18/2010	4:28:12 PM	Helium MFC set to  500.000000
5/18/2010	4:28:12 PM	H2 MFC set to  0.000000
5/18/2010	4:28:12 PM	BCl3 MFC set to  0.000000
5/18/2010	4:28:12 PM	SiCl4 MFC set to  0.000000
5/18/2010	4:28:12 PM	Bypass solenoid MFC set to  0.000000
5/18/2010	4:28:12 PM	Tube furnace set to 0
5/18/2010	4:28:49 PM	Helium valve closed
5/18/2010	4:28:49 PM	H2 valve closed
5/18/2010	4:28:49 PM	BCl3 valve closed
5/18/2010	4:28:49 PM	PH3 valve closed
5/18/2010	4:28:49 PM	SiCl4 pre valve closed
5/18/2010	4:28:49 PM	SiCl4 post valve closed
5/18/2010	4:28:49 PM	Main Vac valve closed
5/18/2010	4:28:49 PM	Bypass valve closed
5/18/2010	4:28:49 PM	Bubbler valve closed
5/18/2010	4:28:49 PM	Helium MFC set to  0.000000
5/18/2010	4:28:49 PM	H2 MFC set to  0.000000
5/18/2010	4:28:49 PM	BCl3 MFC set to  0.000000
5/18/2010	4:28:49 PM	SiCl4 MFC set to  0.000000
5/18/2010	4:28:49 PM	Bypass solenoid MFC set to  0.000000
5/18/2010	4:28:49 PM	Tube furnace set to 0
5/18/2010	4:28:50 PM	Run finished at 4:28 PM
5/18/2010	4:28:50 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/18/2010	4:28:51 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/18/2010	4:28:51 PM	Recipe started at 4:28 PM
5/18/2010	4:28:51 PM	Helium valve closed
5/18/2010	4:28:51 PM	H2 valve closed
5/18/2010	4:28:51 PM	BCl3 valve closed
5/18/2010	4:28:51 PM	PH3 valve closed
5/18/2010	4:28:51 PM	SiCl4 pre valve closed
5/18/2010	4:28:51 PM	SiCl4 post valve closed
5/18/2010	4:28:51 PM	Main Vac valve closed
5/18/2010	4:28:51 PM	Bubbler valve closed
5/18/2010	4:28:51 PM	Bypass valve opened
5/18/2010	4:28:51 PM	Helium MFC set to  0.000000
5/18/2010	4:28:51 PM	H2 MFC set to  0.000000
5/18/2010	4:28:51 PM	BCl3 MFC set to  0.000000
5/18/2010	4:28:51 PM	SiCl4 MFC set to  0.000000
5/18/2010	4:28:51 PM	Bypass solenoid MFC set to  0.000000
5/18/2010	4:28:51 PM	Tube furnace set to 0
5/18/2010	4:29:17 PM	Helium valve closed
5/18/2010	4:29:17 PM	H2 valve closed
5/18/2010	4:29:17 PM	BCl3 valve closed
5/18/2010	4:29:17 PM	PH3 valve closed
5/18/2010	4:29:17 PM	SiCl4 pre valve closed
5/18/2010	4:29:17 PM	SiCl4 post valve closed
5/18/2010	4:29:17 PM	Bubbler valve closed
5/18/2010	4:29:17 PM	Main Vac valve opened
5/18/2010	4:29:17 PM	Bypass valve opened
5/18/2010	4:29:17 PM	Helium MFC set to  0.000000
5/18/2010	4:29:17 PM	H2 MFC set to  0.000000
5/18/2010	4:29:17 PM	BCl3 MFC set to  0.000000
5/18/2010	4:29:17 PM	SiCl4 MFC set to  0.000000
5/18/2010	4:29:17 PM	Bypass solenoid MFC set to  0.000000
5/18/2010	4:29:17 PM	Tube furnace set to 0
5/18/2010	4:29:18 PM	Run finished at 4:29 PM
5/18/2010	4:29:18 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/18/2010	4:31:34 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/18/2010	4:31:34 PM	Recipe started at 4:31 PM
5/18/2010	4:31:34 PM	H2 valve closed
5/18/2010	4:31:34 PM	BCl3 valve closed
5/18/2010	4:31:34 PM	PH3 valve closed
5/18/2010	4:31:34 PM	SiCl4 pre valve closed
5/18/2010	4:31:34 PM	SiCl4 post valve closed
5/18/2010	4:31:34 PM	Main Vac valve closed
5/18/2010	4:31:34 PM	Bypass valve closed
5/18/2010	4:31:34 PM	Bubbler valve closed
5/18/2010	4:31:34 PM	Helium valve opened
5/18/2010	4:31:34 PM	Helium MFC set to  500.000000
5/18/2010	4:31:34 PM	H2 MFC set to  0.000000
5/18/2010	4:31:34 PM	BCl3 MFC set to  0.000000
5/18/2010	4:31:34 PM	SiCl4 MFC set to  0.000000
5/18/2010	4:31:34 PM	Bypass solenoid MFC set to  0.000000
5/18/2010	4:31:35 PM	Tube furnace set to 0
5/18/2010	4:32:07 PM	Helium valve closed
5/18/2010	4:32:07 PM	H2 valve closed
5/18/2010	4:32:07 PM	BCl3 valve closed
5/18/2010	4:32:07 PM	PH3 valve closed
5/18/2010	4:32:07 PM	SiCl4 pre valve closed
5/18/2010	4:32:07 PM	SiCl4 post valve closed
5/18/2010	4:32:07 PM	Main Vac valve closed
5/18/2010	4:32:07 PM	Bypass valve closed
5/18/2010	4:32:07 PM	Bubbler valve closed
5/18/2010	4:32:07 PM	Helium MFC set to  0.000000
5/18/2010	4:32:07 PM	H2 MFC set to  0.000000
5/18/2010	4:32:07 PM	BCl3 MFC set to  0.000000
5/18/2010	4:32:07 PM	SiCl4 MFC set to  0.000000
5/18/2010	4:32:07 PM	Bypass solenoid MFC set to  0.000000
5/18/2010	4:32:08 PM	Tube furnace set to 0
5/18/2010	4:32:08 PM	Run finished at 4:32 PM
5/18/2010	4:32:08 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/18/2010	4:32:09 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/18/2010	4:32:09 PM	Recipe started at 4:32 PM
5/18/2010	4:32:09 PM	Helium valve closed
5/18/2010	4:32:09 PM	H2 valve closed
5/18/2010	4:32:09 PM	BCl3 valve closed
5/18/2010	4:32:09 PM	PH3 valve closed
5/18/2010	4:32:09 PM	SiCl4 pre valve closed
5/18/2010	4:32:09 PM	SiCl4 post valve closed
5/18/2010	4:32:09 PM	Main Vac valve closed
5/18/2010	4:32:09 PM	Bubbler valve closed
5/18/2010	4:32:09 PM	Bypass valve opened
5/18/2010	4:32:09 PM	Helium MFC set to  0.000000
5/18/2010	4:32:09 PM	H2 MFC set to  0.000000
5/18/2010	4:32:09 PM	BCl3 MFC set to  0.000000
5/18/2010	4:32:09 PM	SiCl4 MFC set to  0.000000
5/18/2010	4:32:09 PM	Bypass solenoid MFC set to  0.000000
5/18/2010	4:32:09 PM	Tube furnace set to 0
5/18/2010	4:32:34 PM	Helium valve closed
5/18/2010	4:32:34 PM	H2 valve closed
5/18/2010	4:32:34 PM	BCl3 valve closed
5/18/2010	4:32:34 PM	PH3 valve closed
5/18/2010	4:32:34 PM	SiCl4 pre valve closed
5/18/2010	4:32:34 PM	SiCl4 post valve closed
5/18/2010	4:32:34 PM	Bubbler valve closed
5/18/2010	4:32:34 PM	Main Vac valve opened
5/18/2010	4:32:34 PM	Bypass valve opened
5/18/2010	4:32:34 PM	Helium MFC set to  0.000000
5/18/2010	4:32:34 PM	H2 MFC set to  0.000000
5/18/2010	4:32:34 PM	BCl3 MFC set to  0.000000
5/18/2010	4:32:34 PM	SiCl4 MFC set to  0.000000
5/18/2010	4:32:34 PM	Bypass solenoid MFC set to  0.000000
5/18/2010	4:32:34 PM	Tube furnace set to 0
5/18/2010	4:32:35 PM	Run finished at 4:32 PM
5/18/2010	4:32:35 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/18/2010	4:33:05 PM	Bypass valve closed
5/18/2010	4:33:05 PM	Main Vac valve closed
5/18/2010	4:33:21 PM	Main Vac valve opened
5/18/2010	4:33:22 PM	Bypass valve opened
5/18/2010	4:43:04 PM	Recipe started at 4:43 PM
5/18/2010	4:43:04 PM	Helium valve closed
5/18/2010	4:43:04 PM	BCl3 valve closed
5/18/2010	4:43:04 PM	PH3 valve closed
5/18/2010	4:43:04 PM	SiCl4 pre valve closed
5/18/2010	4:43:04 PM	SiCl4 post valve closed
5/18/2010	4:43:04 PM	Main Vac valve closed
5/18/2010	4:43:04 PM	Bypass valve closed
5/18/2010	4:43:04 PM	Bubbler valve closed
5/18/2010	4:43:04 PM	H2 valve opened
5/18/2010	4:43:04 PM	Helium MFC set to  0.000000
5/18/2010	4:43:04 PM	H2 MFC set to  500.000000
5/18/2010	4:43:04 PM	BCl3 MFC set to  0.000000
5/18/2010	4:43:04 PM	SiCl4 MFC set to  0.000000
5/18/2010	4:43:04 PM	Bypass solenoid MFC set to  0.000000
5/18/2010	4:43:04 PM	Tube furnace set to 0
5/18/2010	4:44:24 PM	Helium valve closed
5/18/2010	4:44:24 PM	BCl3 valve closed
5/18/2010	4:44:24 PM	PH3 valve closed
5/18/2010	4:44:24 PM	SiCl4 pre valve closed
5/18/2010	4:44:24 PM	SiCl4 post valve closed
5/18/2010	4:44:24 PM	Main Vac valve closed
5/18/2010	4:44:24 PM	Bypass valve closed
5/18/2010	4:44:24 PM	H2 valve opened
5/18/2010	4:44:24 PM	Bubbler valve opened
5/18/2010	4:44:24 PM	Helium MFC set to  0.000000
5/18/2010	4:44:24 PM	H2 MFC set to  500.000000
5/18/2010	4:44:24 PM	BCl3 MFC set to  0.000000
5/18/2010	4:44:24 PM	SiCl4 MFC set to  0.000000
5/18/2010	4:44:24 PM	Bypass solenoid MFC set to  0.000000
5/18/2010	4:44:24 PM	Tube furnace set to 1000
5/18/2010	5:09:24 PM	Helium valve closed
5/18/2010	5:09:24 PM	PH3 valve closed
5/18/2010	5:09:24 PM	Main Vac valve closed
5/18/2010	5:09:24 PM	Bypass valve closed
5/18/2010	5:09:24 PM	H2 valve opened
5/18/2010	5:09:24 PM	BCl3 valve opened
5/18/2010	5:09:24 PM	SiCl4 pre valve opened
5/18/2010	5:09:24 PM	SiCl4 post valve opened
5/18/2010	5:09:24 PM	Bubbler valve opened
5/18/2010	5:09:24 PM	Helium MFC set to  0.000000
5/18/2010	5:09:24 PM	H2 MFC set to  500.000000
5/18/2010	5:09:24 PM	BCl3 MFC set to  35.000000
5/18/2010	5:09:24 PM	SiCl4 MFC set to  450.000000
5/18/2010	5:09:24 PM	Bypass solenoid MFC set to  0.000000
5/18/2010	5:09:24 PM	Tube furnace set to 1000
5/18/2010	5:19:24 PM	H2 valve closed
5/18/2010	5:19:24 PM	BCl3 valve closed
5/18/2010	5:19:24 PM	PH3 valve closed
5/18/2010	5:19:24 PM	SiCl4 pre valve closed
5/18/2010	5:19:24 PM	SiCl4 post valve closed
5/18/2010	5:19:24 PM	Main Vac valve closed
5/18/2010	5:19:24 PM	Bypass valve closed
5/18/2010	5:19:24 PM	Helium valve opened
5/18/2010	5:19:24 PM	Bubbler valve opened
5/18/2010	5:19:24 PM	Helium MFC set to  500.000000
5/18/2010	5:19:24 PM	H2 MFC set to  0.000000
5/18/2010	5:19:24 PM	BCl3 MFC set to  0.000000
5/18/2010	5:19:24 PM	SiCl4 MFC set to  0.000000
5/18/2010	5:19:24 PM	Bypass solenoid MFC set to  0.000000
5/18/2010	5:19:24 PM	Tube furnace set to 0
5/18/2010	5:39:24 PM	Helium valve closed
5/18/2010	5:39:24 PM	H2 valve closed
5/18/2010	5:39:24 PM	BCl3 valve closed
5/18/2010	5:39:24 PM	PH3 valve closed
5/18/2010	5:39:24 PM	SiCl4 pre valve closed
5/18/2010	5:39:24 PM	SiCl4 post valve closed
5/18/2010	5:39:24 PM	Main Vac valve closed
5/18/2010	5:39:24 PM	Bypass valve closed
5/18/2010	5:39:24 PM	Bubbler valve closed
5/18/2010	5:39:24 PM	Helium MFC set to  0.000000
5/18/2010	5:39:24 PM	H2 MFC set to  0.000000
5/18/2010	5:39:24 PM	BCl3 MFC set to  0.000000
5/18/2010	5:39:24 PM	SiCl4 MFC set to  0.000000
5/18/2010	5:39:24 PM	Bypass solenoid MFC set to  0.000000
5/18/2010	5:39:25 PM	Tube furnace set to 0
5/18/2010	5:39:25 PM	Run finished at 5:39 PM
5/18/2010	5:41:04 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/18/2010	5:41:04 PM	Recipe started at 5:41 PM
5/18/2010	5:41:04 PM	Helium valve closed
5/18/2010	5:41:04 PM	H2 valve closed
5/18/2010	5:41:04 PM	BCl3 valve closed
5/18/2010	5:41:04 PM	PH3 valve closed
5/18/2010	5:41:04 PM	SiCl4 pre valve closed
5/18/2010	5:41:04 PM	SiCl4 post valve closed
5/18/2010	5:41:04 PM	Main Vac valve closed
5/18/2010	5:41:04 PM	Bubbler valve closed
5/18/2010	5:41:04 PM	Bypass valve opened
5/18/2010	5:41:04 PM	Helium MFC set to  0.000000
5/18/2010	5:41:04 PM	H2 MFC set to  0.000000
5/18/2010	5:41:04 PM	BCl3 MFC set to  0.000000
5/18/2010	5:41:04 PM	SiCl4 MFC set to  0.000000
5/18/2010	5:41:04 PM	Bypass solenoid MFC set to  0.000000
5/18/2010	5:41:04 PM	Tube furnace set to 0
5/18/2010	5:41:49 PM	Helium valve closed
5/18/2010	5:41:49 PM	H2 valve closed
5/18/2010	5:41:49 PM	BCl3 valve closed
5/18/2010	5:41:49 PM	PH3 valve closed
5/18/2010	5:41:49 PM	SiCl4 pre valve closed
5/18/2010	5:41:49 PM	SiCl4 post valve closed
5/18/2010	5:41:49 PM	Bubbler valve closed
5/18/2010	5:41:49 PM	Main Vac valve opened
5/18/2010	5:41:49 PM	Bypass valve opened
5/18/2010	5:41:49 PM	Helium MFC set to  0.000000
5/18/2010	5:41:49 PM	H2 MFC set to  0.000000
5/18/2010	5:41:49 PM	BCl3 MFC set to  0.000000
5/18/2010	5:41:49 PM	SiCl4 MFC set to  0.000000
5/18/2010	5:41:49 PM	Bypass solenoid MFC set to  0.000000
5/18/2010	5:41:49 PM	Tube furnace set to 0
5/18/2010	5:41:49 PM	Run finished at 5:41 PM
5/18/2010	5:41:49 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
